(19)
(11) EP 1 339 097 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
28.04.2004 Bulletin 2004/18

(43) Date of publication A2:
27.08.2003 Bulletin 2003/35

(21) Application number: 03009911.3

(22) Date of filing: 04.04.2000
(51) International Patent Classification (IPC)7H01L 21/00, B65D 25/54
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 20.04.1999 JP 11250999

(62) Application number of the earlier application in accordance with Art. 76 EPC:
00107281.8 / 1047112

(71) Applicant: SHIN-ETSU POLYMER CO., LTD.
Tokyo (JP)

(72) Inventors:
  • Fujimori, Yoshiaki
    Itoigawa-shi, Niigata-ken (JP)
  • Takhashi, Masato
    Itoigawa-shi, Niigata-ken (JP)

(74) Representative: Hössle Kudlek & Partner 
Patentanwälte, Postfach 10 23 38
70019 Stuttgart
70019 Stuttgart (DE)

   


(54) Wafer container box


(57) Disclosed is a container box for storage and transportation of wafer materials or other precision substrate plates in the electronic industries as well as for automatic loading of the wafer materials on a wafer-processing machine. Several accessory parts can be mounted on the container box as selected according to the usage conditions of the container box so as to accomplish improvements in the weight decrease, handleableness and storage. The wafer container box consists of a box body having a front opening and a covering thereon, wherein the box body is made from an opaque material having a form capable of holding a plurality of wafer materials aligned in a parallel horizontal disposition and comprises: a plurality of mounting means for mounting of accessory parts used in transportation of the container box in a demountable fashion on the outer surface of the box body, characterized by a see-through window made from a transparent material, provided on at least one side wall of the box body.







Search report