TECHNICAL FIELD
[0001] The present invention generally relates to semiconductor integrated circuits and
               power supply voltage control methods, and more particularly to a semiconductor integrated
               circuit having a power supply voltage monitoring circuit and to a power supply voltage
               control method for controlling a power supply voltage that is supplied to such a semiconductor
               integrated circuit.
 
            BACKGROUND ART
[0002] FIG. 1 is a diagram for explaining an example of a conventional power supply voltage
               control method. In FIG. 1, a LSI (Large Scale Integrated circuit) 1 includes a power
               line 2 that has a resistance an inductance and a capacitance, and transistors 3. A
               DC-DC converter 5 that converts a DC (Direct Current) input voltage into a predetermined
               DC output voltage supplies a converted power supply voltage VDD to the LSI 1 via a
               power line 6 that includes a resistance, inductance and a capacitance. In FIG. 1,
               GND denotes the ground. In this example, a voltage at a power supply input terminal
               of the LSI 1, that is, an analog voltage signal, is fed back to the DC-DC converter
               5 in order to control the power supply voltage VDD.
 
            [0003] In the example illustrated in FIG. 1, the voltage at the power supply input terminal
               of the LSI 1 is monitored and fed back to the DC-DC converter 5. Because a feedback
               loop does not necessarily stabilize, the power supply voltage that is actually applied
               to the transistors 3 within the LSI 1 may be unknown. Consequently, it is difficult
               to control the power supply voltage that is applied to the transistors 3 within the
               LSI 1 to a constant voltage.
 
            [0004] It is conceivable to provide a dedicated line exclusively for monitoring the power
               supply voltage that is actually applied to the transistors 3 within the LSI 1. But
               in this case, a fluctuation in the power supply voltage at a high frequency may not
               be monitored unless the resistance of the dedicated line is reduced to a sufficiently
               small resistance. In addition, when the dedicated line is provided, it is necessary
               to separately provide on a package of the LSI 1 a terminal (that is, a signal pin)
               exclusively for the voltage monitoring. Furthermore, when a voltage monitoring point
               is provided at a central part within the LSI 1, it is necessary to route the signal
               lines within the package so as not to interfere with existing lines. Consequently,
               the degree of freedom of layout within the package of the LSI 1 deteriorates, and
               the area occupied by the lines increases to thereby limit the area in which circuit
               elements such as the transistors 3 may be provided within the LSI 1.
               
               
Patent Document 1: Japanese Laid-Open Patent Publication No.2004-228104
               Patent Document 2: Japanese Laid-Open Patent Publication No.2008-72045
 
            DISCLOSURE OF THE INVENTION
PROBLEM TO BE SOLVED BY THE INVENTION
[0005] According to the conventional power supply voltage control method, there was a problem
               in that it is difficult to control the power supply voltage constant within the LSI
               using a relatively simple structure, without increasing the number of terminals of
               the LSI package.
 
            [0006] Accordingly, one object of the present invention is to provide a semiconductor integrated
               circuit and a power supply voltage control method which may control the power supply
               voltage constant within the semiconductor integrated circuit using a relatively simple
               structure, without increasing the number of terminals of the semiconductor integrated
               circuit.
 
            MEANS OF SOLVING THE PROBLEM
[0007] According to one aspect of the present invention, a semiconductor integrated circuit
               includes a first selector that selectively outputs one of a power supply voltage supplied
               from an outside of the semiconductor integrated circuit and a predetermined reference
               voltage to a monitoring target voltage terminal depending on an adjusting mode signal;
               a voltage monitoring circuit that monitors a voltage fluctuation at the monitoring
               target voltage terminal and converts the voltage fluctuation that is monitored into
               a digital signal; and an input and output circuit that outputs the digital signal
               to the outside of the semiconductor integrated circuit.
 
            [0008] According to another aspect of the present invention, a power supply voltage control
               method for controlling a power supply voltage supplied from a power supply control
               circuit to a semiconductor integrated circuit, the power supply voltage control method
               including switching a first selector within the semiconductor integrated circuit depending
               on an adjusting mode signal in order to selectively output to a monitoring target
               voltage terminal a predetermined reference voltage during a circuit adjusting period
               and the power supply voltage during a voltage monitoring period; converting into a
               digital signal a voltage fluctuation monitored at the monitoring target voltage terminal
               by a voltage monitoring circuit within the semiconductor integrated circuit; and controlling
               the power supply voltage output from the voltage control circuit by outputting the
               digital signal from an input and output circuit within the semiconductor integrated
               circuit to the voltage control circuit.
 
            EFFECTS OF THE INVENTION
[0009] According to the semiconductor integrated circuit and the power supply voltage control
               method that are disclosed herein, the power supply voltage within the semiconductor
               integrated circuit may be controlled constant using a relatively simple structure,
               without increasing the number of terminals of the semiconductor integrated circuit.
 
            BRIEF DESCRIPTION OF THE DRAWING
[0010] 
               
               FIG. 1 is a diagram for explaining an example of a conventional power supply voltage
                  control method;
               FIG. 2 is a diagram for explaining a power supply voltage control method in an embodiment
                  of the present invention;
               FIG. 3 is a diagram for explaining an example of a semiconductor integrated circuit;
               FIG. 4 is a diagram for explaining an example of an adjusting circuit illustrated
                  in FIG. 3;
               FIG. 5 is a flow chart for explaining an operation of the semiconductor integrated
                  circuit illustrated in FIG. 3;
               FIG. 6 is a timing chart for explaining the operation of the semiconductor integrated
                  circuit illustrated in FIG. 3;
               FIG. 7 is a diagram for explaining another example of the semiconductor integrated
                  circuit;
               FIG. 8 is a diagram for explaining an example of an adjusting circuit illustrated
                  in FIG. 7;
               FIG. 9 is a flow chart for explaining an operation of the semiconductor integrated
                  circuit illustrated in FIG. 7;
               FIG. 10 is a timing chart for explaining the operation of the semiconductor integrated
                  circuit illustrated in FIG. 7;
               FIG. 11 is a diagram for explaining another example of the semiconductor integrated
                  circuit; and
               FIG. 12 is a diagram for explaining another example of the semiconductor integrated
                  circuit.
 
            DESCRIPTION OF THE REFERENCE NUMERALS
[0011] 
               
               
                  - 2, 6
- Power Line
- 3
- Transistor
- 11, 11-1 to 11-3, 11-41, 11-42
- LSI
- 12, 12-1, 12-2, 12-21 to 12-4n
- Voltage Monitoring Circuit
- 13
- Input and Output Circuit
- 21, 31
- Voltage Control Circuit
- 61
- Signal Processing Circuit
- 111
- Regulator
- 112
- Selector
- 113
- Voltage Generating Circuit
- 114-1, 114-2
- Adjusting Circuit
 
            BEST MODE OF CARRYING OUT THE INVENTION
[0012] According to the semiconductor integrated circuit and the power supply voltage control
               method that are disclosed herein, a power supply control circuit controls a power
               supply voltage supplied to the semiconductor integrated circuit. A selector within
               the semiconductor integrated circuit is switched depending on an adjusting mode signal
               in order to selectively output a predetermined reference voltage during a circuit
               adjusting period and to selectively output the power supply voltage during a voltage
               monitoring period, to be supplied to a monitoring target voltage terminal. A voltage
               fluctuation at the monitoring target voltage terminal is monitored by a voltage monitoring
               circuit within the semiconductor integrated circuit, and the monitored voltage fluctuation
               is output after being converted into a digital signal. The digital signal is output
               from an input and output circuit to a voltage control circuit within the semiconductor
               integrated circuit to the voltage control circuit, in order to control a power supply
               voltage output from the voltage control circuit.
 
            [0013] The input and output circuit may selectively output scan data prescribed by the IEEE1149.1
               JTAG (Joint Test Action Group) standard, for example, when performing a test, and
               may output the digital signal during a normal operation. Accordingly, the power supply
               voltage within the semiconductor integrated circuit may be controlled constant using
               a relatively simple structure, without increasing the number of terminals of the semiconductor
               integrated circuit.
 
            [0014] Next, a description will be given of the semiconductor integrated circuit and the
               power supply voltage control method in each embodiment of the present invention, by
               referring to FIG. 2 and the subsequent figures.
 
            EMBODIMENTS
[0015] FIG. 2 is a diagram for explaining a power supply voltage control method in an embodiment
               of the present invention. In FIG. 2, those parts that are substantially the same as
               those corresponding parts in FIG. 1 are designated by the same reference numerals,
               and a description thereof will be omitted.
 
            [0016] In FIG. 2, a LSI (Large Scale Integrated circuit) 11 includes a power line 2 that
               has a resistance, an inductance and a capacitance, transistors 3, a voltage monitoring
               circuit 12, and an input and output (I/O) circuit 13. A voltage control circuit 21
               supplies a power supply voltage VDD to the LSI 11 via a power line 6 that has a resistance,
               an inductance and a capacitance. For example, the voltage control circuit 21 may be
               formed by a DC-DC converter that converts an input DC voltage into a predetermined
               output DC voltage. In FIG. 2, GND denotes the ground. In this example, the power supply
               voltage applied to the transistors 3 within the LSI 11 is monitored by the voltage
               monitoring circuit 12, and the power supply voltage VDD is controlled by feeding back
               a voltage signal corresponding to the monitored power supply voltage to the voltage
               control circuit 21 via the I/O circuit 13.
 
            [0017] In the example illustrated in FIG. 2, the voltage monitoring circuit 12 monitors
               a voltage fluctuation of the power supply voltage applied to the transistors 3 within
               the LSI 11, and converts the monitored voltage fluctuation into a digital signal that
               is output. This digital signal is output from the LSI 11 via the I/O circuit 13, in
               a manner similar to a data signal, and is fed back to the voltage control circuit
               21. For this reason, the power supply voltage applied to the transistors 3 within
               the LSI 11 may be controlled constant, based on a monitored result of the power supply
               voltage that is actually applied to the transistors 3 within the LSI 11.
 
            [0018] A monitoring target voltage within the LSI 11, that is, the power supply voltage
               applied to the transistors 3, a predetermined reference voltage, and a control signal
               are input to the voltage monitoring circuit 12. In addition, the voltage monitoring
               circuit 12 is connected to the ground GND, and outputs a voltage signal corresponding
               to the monitoring target voltage or, a voltage state signal representing a state of
               the monitoring target voltage. The voltage monitoring circuit 12 outputs the voltage
               signal or the voltage state signal, indicating how high or how low the monitoring
               target voltage is with respect to the predetermined reference voltage that is input
               to the voltage monitoring circuit 12. The number of bits of the voltage signal or
               the voltage stage signal output from the voltage monitoring circuit 12 determines
               the resolution of the power supply voltage control. The control signal input to the
               voltage monitoring circuit 12 is used to adjust inconsistencies in the characteristics,
               sensitivities, and the like of the transistors within the voltage monitoring circuit
               12 that may include PMOS (P-channel Metal Oxide Semiconductor) transistors and NMOS
               (N-channel Metal Oxide Semiconductor) transistors.
 
            [0019] According to the power supply voltage control method of FIG. 2, the fluctuation in
               the power supply voltage actually applied to the transistors 3 within the LSI 11 may
               be monitored, even in the case of a high-frequency fluctuation.
 
            [0020] In addition, because the voltage signal or the voltage state signal output from the
               voltage monitoring circuit 12 is a digital signal, the voltage signal or the voltage
               state signal may be output outside the LSI 11 using the I/O circuit 13 that is originally
               provided within the LSI 11. Furthermore, even when a plurality of voltage monitoring
               points exist within the LSI 11, the voltage monitoring point may be switched by the
               control signal that is input to the voltage monitoring circuit 12. Even if the voltage
               monitoring point is located in a central part within the LSI 11, the wiring layout
               within the package of the LSI 11 may be designed with ease by outputting the voltage
               signal or the voltage state signal via the I/O circuit 13 that is located in a peripheral
               part within the LSI 11. Moreover, by outputting the voltage signal or the voltage
               state signal outside the LSI 11 via the I/O circuit 13 that is originally provided
               within the LSI 11 for use when performing a test, the number of terminals (that is,
               the number of signal pins) provided on the package of the LSI 11 may be reduced.
 
            [0021] FIG. 3 is a diagram for explaining an example of a semiconductor integrated circuit.
               In FIG. 3, those parts that are the same as those corresponding parts in FIG. 2 are
               designated by the same reference numerals, and a description thereof will be omitted.
               For the sake of convenience, the power supply lines 2 and 6 are not illustrated as
               blocks and the illustration of the transistors 3 is omitted in FIG. 3 and FIGS. 7,
               11 and 12 which will be described later.
 
            [0022] A LSI 11-1 includes a regulator 111, a selector 112, a voltage generating circuit
               113, an adjusting circuit 114-1, a voltage monitoring circuit 12-1, selectors 122-1
               through 122-n, and an I/O circuit 13 that are connected as illustrated in FIG. 3.
               The voltage monitoring circuit 12-1 includes a plurality of inverter circuits 120,
               including PMOS transistors and NMOS transistors, and a plurality of buffers 121 for
               shaping signal waveforms. For example, the selectors 112 and 122-1 through 122-n may
               be formed by transfer gates.
 
            [0023] A power supply voltage VDD output from a voltage control circuit (DC-DC converter)
               21, and a predetermined reference voltage VDDref output from the regulator 111, are
               input to the selector 112. Accordingly, the power supply voltage VDD from outside
               the LSI 11-1 or the reference voltage VDDref from the regulator 111 is supplied to
               a monitoring target voltage terminal VDDobs of the voltage monitoring circuit 12-1
               via the selector 112. The regulator 111 generates the reference voltage VDDref and
               a voltage VDDref/2 based on a voltage VDDH that is higher than the power supply voltage
               VDD and is output from the voltage control circuit (DC-DC converter) 31, and supplies
               the voltage VDDref/2 to the inverter circuits 120 of the voltage monitoring circuit
               12-1.
 
            [0024] The adjusting circuit 114-1 generates an adjusting mode signal AMS and a voltage
               setting value VSV based on a clock signal CLK and voltage signals Sig
1 through Sign that are output from the buffers 121 of the voltage monitoring circuit
               12-1, and supplies the adjusting mode signal AMS outside the LSI 11-1 and to the selector
               112 as a selection signal. The adjusting circuit 114-1 supplies the voltage setting
               value VSV to the voltage generating circuit 113.
 
            [0025] The voltage generating circuit 113 generates control signals VBSp and VBSn based
               on the voltage VDDH output from the voltage control circuit 31 and the voltage setting
               value VSV output from the adjusting circuit 114-1, and supplies the control signals
               VBSp and VBSn to the PMOS transistors and the NMOS transistors forming the inverter
               circuits 120 of the voltage monitoring circuit 12-1 as control signals. The control
               signal VBSp is applied as a back bias signal to the PMOS transistor of each inverter
               circuit 120, and the control signal VBSn is applied as a back bias signal to the NMOS
               transistor of each inverter circuit 120. A scan-in signal SIS is input to the LSI
               11-1 and supplied to a known latch scan chain (not illustrated) within the LSI 11-1.
               A scan data output (or test signal) SDO of the latch scan chain is supplied to one
               input of each of the selectors 122-1 through 122-n, and the voltage signals Sig
1 through Sign output from the voltage monitoring circuit 12-1 are supplied to respective
               other inputs of each of the selectors 122-1 through 122-n. A test mode signal TMS
               is supplied, as a selection signal, to each of the selectors 122-1 through 122-n.
               Outputs of the selectors 122-1 through 122-n are output from the LSI 11-1 via the
               I/O circuit 13 and fed back to the voltage control circuit 21.
 
            [0026] The plurality of inverter circuits 120 within the voltage monitoring circuit 12-1
               have mutually different threshold voltages by varying β values of transistors in order
               to vary outputs of the transistors, for example. In this example, the inverter circuits
               120 located more towards the left side in FIG. 3 may more easily output a logic value
               "1" (or a high level). The voltage of the monitoring target voltage terminal VDDobs
               is applied to the transistors of each inverter circuit 120 as a power supply voltage.
               In addition, the voltage VDDref/2 generated by the regulator 111 is applied to each
               inverter circuit 120. Because the inverter circuit 120 located more towards the left
               side in FIG. 3 may more easily output the logic value "1", the output pattern of the
               plurality of inverter circuits 120 changes depending on the level of the power supply
               voltage at the monitoring target voltage terminal VDDobs. An output waveform of each
               inverter circuit 120 is shaped by the corresponding buffer 121. Hence, the shaped
               voltage signals Sig
1 through Sign from the buffers 121 are output from the voltage monitoring circuit
               12-1.
 
            [0027] Because the number of input and output terminals of the LSI 11-1, that is, the number
               of signal pins of the package of the LSI 11-1, is not increased in order to output
               the voltage signals Sig
1 through Sign, the I/O circuit 13 that is originally used for the test signal only
               when testing the LSI 11-1 and is not used during normal operation, may be used in
               common for the voltage signals Sig
1 through Sig
n. In this example, the test signal is formed by the scan data output SDO (Scan Data
               Output) of the parallel scan. The selectors 122-1 through 122-n are switched depending
               on the test mode signal TMS to output the scan data output SDO or the voltage signals
               Sig
1 through Sign. At the time of the testing, the test mode signal TMS has a logic value
               "0", and the parallel scan data output SDO is supplied to the I/O circuit 13. On the
               other hand, at the time of the normal operation, the test mode signal TMS has a logic
               value "1", and the voltage signals Sig
1 through Sign are supplied to the I/O circuit 13.
 
            [0028] In FIG. 3, the voltage monitoring is performed after adjusting the circuit in order
               to absorb inconsistencies in the characteristics of individual LSIs 11-1. First, the
               predetermined reference voltage VDDref is supplied to the monitoring target voltage
               terminal VDDobs of the voltage monitoring circuit 12-1, and the voltages of the control
               signals VBSp and VBSn generated by the voltage generating circuit 113 are adjusted
               so that the output pattern of the voltage signals Sig
1 through Sign becomes ideal (for example, the pattern includes the same number of
               logic value "0"s and logic value "1"s). The control signals VBSp and VBSn may be fixed
               to the voltages after the adjustment. Then, the voltage supplied to the monitoring
               target voltage terminal VDDobs is switched to the power supply voltage VDD before
               starting the normal operation of the LSI 11-1, and the actual voltage at the monitoring
               target voltage terminal VDDobs is monitored.
 
            [0029] FIG. 4 is a diagram for explaining an example of the adjusting circuit 114-1 illustrated
               in FIG. 3. The adjusting circuit 114-1 includes an inverter circuit 41, an OR circuit
               42, a signal judging circuit 43-1, a scan latch 44 for retaining a voltage setting
               value, and a scan latch 45 for retaining and adjusting mode, that are connected as
               illustrated in FIG. 4.
 
            [0030] The value of the scan latch 45 is set to a logic value "1" indicating the adjusting
               mode, and the value of the scan latch 44 is set to an initial value, by the scan.
               In this state, the selector 112 selectively outputs the predetermined reference voltage
               VDDref from the regulator 111 depending on the adjusting mode signal AMS. The signal
               judging circuit 43-1 judges whether the voltage signals Sig
1 through Sign have the setting values (for example, the same number of logic value
               "0"s and logic value "1"s), and outputs a next voltage setting value NVS and an adjustment
               judging signal AJS. The next voltage setting value NVS and the adjustment judging
               signal AJS are input to the scan latch 44 and the scan latch 45 every time the clock
               signal CLK is applied thereto. The next voltage setting value NVS changes the setting
               values in order to increase the voltages of the control signals VBSp and VBSn when
               the number of logic value "1"s is larger and to decrease the voltages of the control
               signals VBSp and VBSn when the number of logic value "0"s is larger as a result of
               comparing the setting value and the values of the voltage signals Sig
1 through Sign. In this example, the adjustment judging signal AJS output from the
               signal judging circuit 43-1 assumes the logic value "0" when the setting value and
               the values of the voltage signals Sig
1 through Sign match, and otherwise assumes the logic value "1".
 
            [0031] When the value of the scan latch 45 assumes the logic value "0", the clock signal
               CLK to the scan latches 44 and 45 within the adjusting circuit 114-1 are disabled.
               In addition, a completion of the adjustment may be judged from the adjusting mode
               signal AMS that is output from the LSI 11-1 to the outside.
 
            [0032] FIG. 5 is a flow chart for explaining an operation of the semiconductor integrated
               circuit illustrated in FIG. 3. In FIG. 5, a step S1 selectively outputs the voltage
               signals Sig
1 through Sign from the selectors 122-1 through 122-n depending on the test mode signal
               TMS. A step S2 selectively outputs the predetermined reference voltage VDDref from
               the selector 112 depending on the adjusting mode signal AMS. A step S3 sets an initial
               state by setting the voltage of the control signal VBSn with respect to the power
               supply voltage VDD to 0, and setting the voltage of the control signal VBSp with respect
               to the ground GND to 0. A step S4 monitors the voltage signals Sig
1 through Sign by the adjusting circuit 114-1. A step S5 judges whether the voltage
               signals Sig
1 through Sign have an estimated pattern. The process advances to a step S6 if the
               judgement result in the step S5 is NO, and the process advances to a step S7 if the
               judgement result in the step S5 is YES. The step S6 controls the voltage generating
               circuit 113 by the adjusting circuit 114-1, and decreases the voltages of the control
               signals VBSn and VBSp when the pattern of the voltage signals Sig
1 through Sign includes a larger number of logic value "0"s than the estimated pattern,
               and increases the voltages of the control signals VBSn and VBSp when the pattern of
               the voltage signals Sig
1 through Sign includes a larger number of logic value "1"s than the estimated pattern.
               The process returns to the step S4 after the step S6.
 
            [0033] On the other hand, the step S7 selectively outputs the power supply voltage VDD from
               the selector 112 depending on the adjusting mode signal AMS. A step S8 causes the
               LSI 11-1 to perform a normal operation. A step S9 monitors the voltage signals Sig
1 through Sign by the adjusting circuit 114-1. A step S10 judges whether the voltage
               signals Sig
1 through Sign have the estimated pattern. The process advances to a step S11 if the
               judgement result in the step S10 is NO, and the process returns to the step S9 if
               the judgement result in the step S10 is YES. The step S11 controls the voltage control
               circuit 21 by the output of the LSI 11-1, and increases the power supply voltage VDD
               when the pattern of the voltage signals Sig
1 through Sign includes a larger number of logic value "0"s than the estimated pattern,
               and decreases the power supply voltage VDD when the pattern of the voltage signals
               Sig
1 through Sign includes a larger number of logic value "1"s than the estimated pattern.
               The process returns to the step S9 after the step S11.
 
            [0034] FIG. 6 is a timing chart for explaining the operation of the semiconductor integrated
               circuit illustrated in FIG. 3. In FIG. 6, the ordinate indicates the voltage in arbitrary
               units, and the abscissa indicates the time in arbitrary units. FIG. 6 illustrates
               the voltage VDDH with respect to the ground GND, the voltage of the control signal
               VBSn with respect to the ground GND, the voltage of the control signal VBSp with respect
               to the voltage of the monitoring target voltage terminal VDDobs, the voltage of the
               monitoring target voltage terminal VDDobs with respect to the ground GND, and the
               voltages of the voltage signals Sig
1 through Sign.
 
            [0035] In FIG. 6, t1 denotes a timing at which the voltages of the control signals VBSn
               and VBSp are increased in order to make the logic value of the voltage signal Sig
3 "0", and t2 denotes a timing at which the voltage of the monitoring target voltage
               terminal VDDobs is switch from the predetermined reference voltage VDDref to the power
               supply voltage VDD. In addition, L1, L2, L3 and L4 respectively denote levels at which
               the voltage signals Sig
1, Sig
2, Sig
3 and Sig
4 become 0. The circuit adjustment described above is performed during a circuit adjusting
               period or interval T1, and the monitoring of the voltage signals Sig
1 through Sign described above is performed during a voltage monitoring period or interval
               T2.
 
            [0036] FIG. 7 is a diagram for explaining another example of the semiconductor integrated
               circuit. In FIG. 7, those parts that are the same as those corresponding parts in
               FIG. 3 are designated by the same reference numerals, and a description thereof will
               be omitted.
 
            [0037] In the example illustrated in FIG. 7, outputs of inverter circuits 120 that receive
               an input signal to a monitoring target voltage terminal VDDobs are not output directly
               to the outside from a voltage monitoring circuit 12-2, but are output to inputs of
               selectors 122 and 123. The selectors 122 and 123 respectively select signals to be
               output depending on control signals (or selection signals) SELL and SELH from a scan
               dedicated latch 115 for setting a voltage monitoring sensitivity. Outputs of the inverter
               circuits 120 selectively output from the selector 122 are received from the inverter
               circuits 120 having transistors having a lower threshold voltage than that of the
               inverter circuits 120 whose outputs are selectively output from the selector 123.
               The output of the selector 122 is output from the voltage monitoring circuit 12-2
               as a low voltage signal LVS via an inverter 124. The output of the selector 123 is
               output from the voltage monitoring circuit 12-2 as a high voltage signal HVS. The
               low voltage signal LVS assumes a logic value "1" when a low voltage is monitored in
               the voltage monitoring circuit 12-2, and the high voltage signal HVS assumes a logic
               value "1" when a high voltage is monitored in the voltage monitoring circuit 12-2.
 
            [0038] A scan-in signal SIS is input to the LSI 11-2 and supplied to a known latch scan
               chain (not illustrated) within the LSI 11-2. A scan data output (or test signal) SDO
               from the latch scan chain is supplied to one input of each of selectors 116 and 117.
               The low voltage signal LVS output from the voltage monitoring circuit 12-2 is supplied
               to the other input of the selector 116, and the high voltage signal HVS output from
               the voltage monitoring circuit 12-2 is supplied to the other input of the selector
               117. In addition, a test mode signal TMS is supplied to each of the selectors 116
               and 117 as a selection signal. Outputs of the selectors 116 and 117 are output from
               the LSI 11-2 via an I/O circuit 13, and fed back to a voltage control circuit 21.
 
            [0039] In FIG. 7, the voltage monitoring is performed after adjusting the circuit in order
               to absorb inconsistencies in the characteristics of individual LSIs 11-2. First, the
               scan dedicated latch 115 supplies the control signals SELL and SELH in order to increase
               the voltage monitoring sensitivity and to select from the voltage signals Sig
1 through Sign the voltage signals that are to be output as the low voltage signal
               LVS and the high voltage signal HVS. A predetermined reference voltage VDDref is supplied
               to a monitoring target voltage terminal VDDobs of the voltage monitoring circuit 12-2,
               in order to adjust control signals VBSn and VBSp generated by a voltage generating
               circuit 113 so that both the low voltage signal LVS and the high voltage signal HVS
               become 0. The control signals VBSn and VBSp are fixed to the voltages after the adjustment.
               Then, after arbitrarily setting the voltage monitoring sensitivity of the LSI 11-2
               at the time of the normal operation by the control signals SELL and SELH, the voltage
               supplied to the monitoring target voltage terminal VDDobs is switched to the power
               supply voltage VDD before starting the normal operation of the LSI 11-2, and the actual
               voltage at the monitoring target voltage terminal VDDobs is monitored.
 
            [0040] Because the number of input and output terminals of the LSI 11-2, that is, the number
               of signal pins of the package of the LSI 11-2, is not increased in order to output
               the low voltage signal LVS and the high voltage signal HVS, the I/O circuit 13 that
               is originally used for the test signal only when testing the LSI 11-2 and is not used
               during normal operation, may be used in common for the low voltage signal LVS and
               the high voltage signal HVS. In this example, the test signal is formed by the scan
               data output SDO of the parallel scan. The selectors 116 and 117 are switched depending
               on the test mode signal TMS to output the scan data output SDO or the low voltage
               signal LVS and the high voltage signal HVS. At the time of the testing, the test mode
               signal TMS has a logic value "0", and the parallel scan data output SDO is supplied
               to the I/O circuit 13. On the other hand, at the time of the normal operation, the
               test mode signal TMS has a logic value "1", and the low voltage signal LVS and the
               high voltage signal HVS are supplied to the I/O circuit 13.
 
            [0041] FIG. 8 is a diagram for explaining an example of the adjusting circuit 114-2 illustrated
               in FIG. 7. In FIG. 8, those parts that are the same as those corresponding parts in
               FIG. 4 are designated by the same reference numerals, and a description thereof will
               be omitted.
 
            [0042] The value of a scan latch 45 is set to a logic value "1" indicating the adjusting
               mode, the value of a scan latch 44 is set to an initial value, and the scan dedicated
               latch 115 illustrated in FIG. 7 is set to selector setting values (SELL and SELH)
               to set the sensitivity to that of the voltage adjusting mode, by the scan. In this
               state, the selector 112 selectively outputs the predetermined reference voltage VDDref
               from the regulator 111 depending on the adjusting mode signal AMS. A signal judging
               circuit 43-2 judges whether both the low voltage signal LVS and the high voltage signal
               HVS have a logic value "0", and outputs a next voltage setting value NVS and an adjustment
               judging signal AJS. The next voltage setting value NVS and the adjustment judging
               signal AJS are input to the scan latch 44 and the scan latch 45 every time the clock
               signal CLK is applied thereto. The next voltage setting value NVS changes the setting
               values in order to increase the voltages of the control signals VBSp and VBSn when
               the high voltage signal HVS has the logic value "1" and to decrease the voltages of
               the control signals VBSp and VBSn when the low voltage signal LVS has the logic value
               "0". In this example, the adjustment judging signal AJS output from the signal judging
               circuit 43-2 assumes the logic value "0" when both the low voltage signal LVS and
               the high voltage signal HVS have the logic value "0", and otherwise assumes the logic
               value "1".
 
            [0043] When the value of the scan latch 45 assumes the logic value "0", the clock signal
               CLK to the scan latches 44 and 45 within the adjusting circuit 114-2 are disabled.
               In addition, a completion of the adjustment may be judged from the adjusting mode
               signal AMS that is output from the LSI 11-2 to the outside.
 
            [0044] FIG. 9 is a flow chart for explaining an operation of the semiconductor integrated
               circuit illustrated in FIG. 7. In FIG. 9, a step S21 selects from the voltage signals
               Sig
1 through Sign the voltage signals that are to be output from the selectors 122 and
               123 as the low voltage signal LVS and the high voltage signal HVS at a high monitoring
               sensitivity depending on the control signals SELL and SELH, and outputs the selected
               voltage signals. A step S22 selectively outputs the low voltage signal LVS and the
               high voltage signal HVS from the selectors 116 and 117 depending on the test mode
               signal TMS. A step S23 selectively outputs the predetermined reference voltage VDDref
               from the selector 112 depending on the adjusting mode signal AMS. A step S24 sets
               an initial state by setting the voltage of the control signal VBSn with respect to
               the power supply voltage VDD to 0 and setting the voltage of the control signal VBSp
               with respect to the ground GND to 0. A step S25 monitors the low voltage signal LVS
               and the high voltage signal HVS by the adjusting circuit 114-2. A step S26 judges
               whether both the low voltage signal LVS and the high voltage signal HVS have the logic
               value "0". The process advances to a step S27 if the judgement result in the step
               S26 is NO, and the process advances to a step S28 if the judgement result in the step
               S26 is YES. The step S27 controls the voltage generating circuit 113 by the adjusting
               circuit 114-2, in order to decrease the voltages of the control signal VBSn and VBSp
               when the low voltage signal LVS has the logic value "1" and to increase the voltages
               of the control signals VBSn and VBSp when the high voltage signal HVS has the logic
               value "1". The process returns to the step S25 after the step S27.
 
            [0045] On the other hand, the step S28 selects from the voltage signals Sig
1 through Sign the voltage signals that are to be output from the selectors 122 and
               123 as the low voltage signal LVS and the high voltage signal HVS at an arbitrary
               monitoring sensitivity depending on the control signals SELL and SELH, and outputs
               the selected voltage signals. A step S29 selectively outputs the power supply voltage
               VDD from the selector 112 depending on the adjusting mode signal AMS. A step S30 causes
               the LSI 11-2 to perform a normal operation. A step S31 monitors the low voltage signal
               LVS and the high voltage signal HVS by the adjusting circuit 114-2. A step S32 judges
               whether both the low voltage signal LVS and the high voltage signal HVS have the logic
               value "0". The process advances to a step S33 if the judgement result in the step
               S32 is NO, and the process returns to the step S31 if the judgement result in the
               step S32 is YES. The step S33 controls the voltage control circuit 21 by the output
               of the LSI 11-2, in order to increase the power supply voltage VDD when the low voltage
               signal LVS has the logic value "1" and to decrease the power supply voltage VDD when
               the high voltage signal HVS has the logic value "1". The process returns to the step
               S31 after the step S33.
 
            [0046] FIG. 10 is a timing chart for explaining the operation of the semiconductor integrated
               circuit illustrated in FIG. 7. In FIG. 10, the ordinate indicates the voltage in arbitrary
               units, and the abscissa indicates the time in arbitrary units. FIG. 10 illustrates
               the voltage VDDH with respect to the ground GND, the voltage of the control signal
               SELL, the voltage of the control signal SELH, the voltage of the control signal VBSn
               with respect to the ground GND, the voltage of the control signal VBSp with respect
               to the voltage at the monitoring target voltage terminal VDDobs, the voltage of the
               monitoring target voltage terminal VDDobs with respect to the ground GND, the voltages
               of the voltage signals Sig
1 through Sig
4, the voltage of the low voltage signal LVS, and the voltage of the high voltage signal
               HVS.
 
            [0047] In FIG. 10, the voltage signal Sig
1 is selected when the logic value is "0", the voltage signal Sig
2 is selected when the logic value is "1", and the voltage signal Sig
3 is selected when the logic value is "2" for the control signal SELL. In addition,
               the voltage signal Sig
2 is selected when the logic value is "0", the voltage signal Sig
3 is selected when the logic value is "1", and the voltage signal Sig
4 is selected when the logic value is "2" for the control signal SELH.
 
            [0048] FIG. 11 is a diagram for explaining another example of the semiconductor integrated
               circuit. In FIG. 11, those parts that are the same as those corresponding parts in
               FIG. 7 are designated by the same reference numerals, and a description thereof will
               be omitted. In FIG. 11, n voltage monitoring circuits 12-2
1 through 12-2
n, having the same structure as the voltage monitoring circuit 12-2 illustrated in
               FIG. 7, are provided in a LSI 11-3. A low voltage signal LVS1 and a high voltage signal
               HVS1 are output from the voltage monitoring circuit 12-2
1, and a low voltage signal LVSn and a high voltage signal HVSn are output from the
               voltage monitoring circuit 12-2
n. The low voltage signals LVS1 through LVSn from the voltage monitoring circuits 12-2
1 through 12-2
n are supplied to a low voltage signal processing circuit 118. In addition, the high
               voltage signals HVS1 through HVSn from the voltage monitoring circuits 12-2
1 through 12-2
n are supplied to a high voltage signal processing circuit 119. The low voltage signal
               processing circuit 118 outputs the low voltage signal LVS by performing on the low
               voltage signals LVS1 through LVSn a signal processing that may include a logical product
               operation, a logical sum operation, a majority operation, and the like. The high voltage
               signal processing circuit 119 outputs the high voltage signal HVS by performing on
               the high voltage signals HVS1 through HVSn a signal processing that may include a
               logical product operation, a logical sum operation, a majority operation, and the
               like. Accordingly, each of the low voltage signal processing circuit 118 and the high
               voltage signal processing circuit 119 may be formed by an AND circuit, an OR circuit,
               a majority circuit, and the like. The signal processings (that is, operations or computations)
               to be performed by the low voltage signal processing circuit 118 and the high voltage
               signal processing circuit 119 may be set appropriately depending on the usage or the
               like of the LSI 11-3.
 
            [0049] Because the number of input and output terminals of the LSI 11-3, that is, the number
               of signal pins of the package of the LSI 11-3, is not increased in order to output
               the low voltage signal LVS and the high voltage signal HVS, the I/O circuit 13 that
               is originally used for the test signal only when testing the LSI 11-3 and is not used
               during normal operation, may be used in common for the low voltage signal LVS and
               the high voltage signal HVS. In this example, the test signal is formed by the scan
               data output SDO of the parallel scan. The selectors 116 and 117 are switched depending
               on the test mode signal TMS to output the scan data output SDO or the low voltage
               signal LVS and the high voltage signal HVS. At the time of the testing, the test mode
               signal TMS has a logic value "0", and the parallel scan data output SDO is supplied
               to the I/O circuit 13. On the other hand, at the time of the normal operation, the
               test mode signal TMS has a logic value "1", and the low voltage signal LVS and the
               high voltage signal HVS are supplied to the I/O circuit 13.
 
            [0050] FIG. 12 is a diagram for explaining another example of the semiconductor integrated
               circuit. In FIG. 12, those parts that are the same as those corresponding parts in
               FIG. 3 are designated by the same reference numerals, and a description thereof will
               be omitted.
 
            [0051] In the example illustrated in FIG. 12, a power supply voltage VDD from a single voltage
               control circuit (DC-DC converter) 21 is supplied to a plurality of (two in this example)
               LSIs 11-4
1 and 11-4
2 having the same structure as the LSI 11-1 illustrated in FIG. 3. Voltage signals
               Siga
1 through Siga
n are output from the LSI 11-4
1 and supplied to a signal processing part 61. In addition, voltage signals Sigb
1 through Sigb
n are output from the LSI 11-4
2 and supplied to the signal processing part 61. The signal processing part 61 performs
               a signal processing (that is, an operation or computation) to obtain an average value,
               a maximum value, a minimum value, and the like of the voltage signals Siga
1 through Siga
n and the voltage signals Sigb
1 through Sigb
n, and supplies a process result to a voltage control circuit 21. The voltage control
               circuit 21 controls the power supply voltage VDD that is output from the signal processing
               part 61 depending on the process result. The signal processing (that is, operation
               or computation) to be performed by the signal processing part 61 may be set appropriately
               depending on the usage or the like of the LSIs 11-4
1 and 11-4
2.
 
            INDUSTRIAL APPLICABILITY
[0052] The present invention may be applied to various semiconductor integrated circuits
               in which there is a demand to control a power supply voltage constant within the semiconductor
               integrated circuit.
 
            [0053] Further, the present invention is not limited to these embodiments, but various variations
               and modifications may be made without departing from the scope of the present invention.
 
          
         
            
            1. A semiconductor integrated circuit comprising:
               
               
a first selector that selectively outputs one of a power supply voltage supplied from
                  an outside of the semiconductor integrated circuit and a predetermined reference voltage
                  to a monitoring target voltage terminal depending on an adjusting mode signal;
               
               a voltage monitoring circuit that monitors a voltage fluctuation at the monitoring
                  target voltage terminal and converts the voltage fluctuation that is monitored into
                  a digital signal; and
               
               an input and output circuit that outputs the digital signal to the outside of the
                  semiconductor integrated circuit.
  
            2. The semiconductor integrated circuit as claimed in claim 1, wherein the voltage monitoring
               circuit comprises a plurality of inverter circuits each including a plurality of transistors
               having mutually different threshold voltages at which outputs thereof change and applied
               with a voltage at the monitoring target voltage terminal as a power supply voltage,
               and wherein an output pattern of the plurality of inverter circuits changes depending
               on a voltage level at the monitoring target voltage terminal.
 
            3. The semiconductor integrated circuit as claimed in claim 2, wherein the first selector
               selectively outputs the reference voltage during a circuit adjusting period depending
               on the adjusting mode signal and selectively outputs the power supply voltage during
               a voltage monitoring period,
               and further comprising:
               
               
an adjusting circuit that controls a back bias signal supplied to the plurality of
                  transistors based on the digital signal output from the voltage monitoring circuit
                  during the circuit adjusting period.
  
            4. The semiconductor integrated circuit as claimed in claim 2, wherein the first selector
               selectively outputs the reference voltage during a circuit adjusting period depending
               on the adjusting mode signal and selectively outputs the power supply voltage during
               a voltage monitoring period,
               and further comprising:
               
               
a second selector and a third selector that select the digital signal that is to be
                  selectively output depending on a control signal in accordance with a voltage monitoring
                  sensitivity; and
               
               an adjusting circuit configured to control a back bias signal supplied to the plurality
                  of transistors based on the digital signal output from the voltage monitoring circuit
                  during the circuit adjusting period,
               
               wherein the second selector selectively outputs an output of one of the plurality
                  of inverter circuits formed by a transistor having a threshold voltage lower than
                  that of another of the plurality of inverter circuits whose output is selectively
                  output from the third selector.
  
            5. The semiconductor integrated circuit as claimed in any of claims 1 to 4, wherein the
               input and output circuit selectively outputs scan data during a test depending on
               a test mode signal, and selectively outputs the digital signal during a normal operation.
 
            6. The semiconductor integrated circuit as claimed in claim 4, further comprising:
               
               
a plurality of said voltage monitoring circuits;
               
               a first signal processing circuit that outputs the digital signal by performing a
                  signal processing on the digital signal that is selectively output from the second
                  selector of each of the plurality of voltage monitoring circuits; and
               
               a second signal processing circuit that outputs the digital signal by performing a
                  signal processing on the digital signal that is selectively output from the third
                  selector of each of the plurality of voltage monitoring circuits.
  
            7. A power supply voltage control method for controlling a power supply voltage supplied
               from a power supply control circuit to a semiconductor integrated circuit, the power
               supply voltage control method comprising:
               
               
switching a first selector within the semiconductor integrated circuit depending on
                  an adjusting mode signal in order to selectively output to a monitoring target voltage
                  terminal a predetermined reference voltage during a circuit adjusting period and the
                  power supply voltage during a voltage monitoring period;
               
               converting into a digital signal a voltage fluctuation monitored at the monitoring
                  target voltage terminal by a voltage monitoring circuit within the semiconductor integrated
                  circuit; and
               
               controlling the power supply voltage output from the voltage control circuit by outputting
                  the digital signal from an input and output circuit within the semiconductor integrated
                  circuit to the voltage control circuit.
  
            8. The power supply voltage control method as claimed in claim 7, wherein the voltage
               monitoring circuit comprises a plurality of inverter circuits each including a plurality
               of transistors having mutually different threshold voltages at which outputs thereof
               change and applied with a voltage at the monitoring target voltage terminal as a power
               supply voltage, and wherein an output pattern of the plurality of inverter circuits
               changes depending on a voltage level at the monitoring target voltage terminal.
 
            9. The power supply voltage control method as claimed in claim 8, further comprising:
               
               
controlling a back bias signal supplied to the plurality of transistors by an adjusting
                  circuit based on the digital signal output from the voltage monitoring circuit during
                  the circuit adjusting period.
  
            10. The power supply voltage control method as claimed in claim 8, further comprising:
               
               
switching a digital signal that is selectively output from a second selector and a
                  third selector depending on a control signal in accordance with a voltage monitoring
                  sensitivity; and
               
               controlling a back bias signal supplied to the plurality of transistors by an adjusting
                  circuit based on the digital signal output from the voltage monitoring circuit during
                  the circuit adjusting period;
               
               wherein the second selector selectively outputs an output of one of the plurality
                  of inverter circuits formed by a transistor having a threshold voltage lower than
                  that of another of the plurality of inverter circuits whose output is selectively
                  output from the third selector.
  
            11. The power supply voltage control method as claimed in any of claims 7 to 10, further
               comprising:
               
               
controlling the input and output circuit depending on a test mode signal in order
                  to selectively output scan data during a test and selectively output the digital signal
                  during a normal operation.
  
            12. The power supply voltage control method as claimed in claim 10, wherein the semiconductor
               integrated circuit comprises a plurality of said voltage monitoring circuits,
               and further comprising:
               
               
outputting the digital signal by performing a signal processing on the digital signal
                  that is selectively output from the second selector of each of the plurality of voltage
                  monitoring circuits by a first signal processing circuit; and
               
               outputting the digital signal by performing a signal processing on the digital signal
                  that is selectively output from the third selector of each of the plurality of voltage
                  monitoring circuits by a second signal processing circuit.