(19)
(11) EP 1 998 373 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
31.10.2012 Bulletin 2012/44

(43) Date of publication A2:
03.12.2008 Bulletin 2008/49

(21) Application number: 08016225.8

(22) Date of filing: 12.09.2006
(51) International Patent Classification (IPC): 
H01L 29/786(2006.01)
H01L 27/12(2006.01)
H01L 21/77(2006.01)
(84) Designated Contracting States:
DE FI FR GB NL

(30) Priority: 29.09.2005 JP 2005283782

(62) Application number of the earlier application in accordance with Art. 76 EPC:
06019112.9 / 1770788

(71) Applicant: Semiconductor Energy Laboratory Co, Ltd.
Atsugi-shi, Kanagawa 243-0036 (JP)

(72) Inventors:
  • Akimoto, Kengo
    Atsugi-shi Kanagawa-ken, 243-0036 (JP)
  • Honda, Tatsuya
    Atsugi-shi Kanagawa-ken, 243-0036 (JP)
  • Sone, Norihito
    Atsugi-shi Kanagawa-ken, 243-0036 (JP)

(74) Representative: Grünecker, Kinkeldey, Stockmair & Schwanhäusser 
Leopoldstrasse 4
80802 München
80802 München (DE)

   


(54) Semiconductor device having oxide semiconductor layer and manufacturing method thereof


(57) The invention provides an active matrix display device comprising a pixel portion including a thin film transistor having a multi-gate structure, the thin film transistor including a first gate electrode and a second gate electrode over a substrate wherein the first gate electrode and the second gate electrode are connected to each other; an insulating film over the first gate electrode and the second gate electrode; and an oxide semiconductor film over the first gate electrode and the second gate electrode with the insulating film interposed there between; a source electrode and a drain electrode formed on the oxide semiconductor film; and a pixel electrode electrically connected to one of the source electrode and the drain electrode; wherein each of the source electrode and the drain electrode comprises a titanium film formed on the oxide semiconductor film.







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