CLEANROOM AND METHOD FOR PURIFYING A CLEANROOM

Abstract

 A cleanroom comprising an inner chamber, a first outer chamber and a second outer chamber, wherein provided between the inner chamber and the first and second outer chamber is respectively a first wall and a second wall, wherein each wall is provided with a plurality of openings which are arranged distributed in a height and width direction of the wall, wherein at least two of the plurality of openings are each provided with an air control means which is configured individually to control an air flow rate through the respective opening, wherein the air control means are configured to provide the inner chamber with clean air from at least one of the first and second outer chamber in order to realize a primarily horizontal clean airflow in the inner chamber.

Description

[0001] The invention relates to a cleanroom. The invention further relates to a method for purifying the cleanroom.

[0002] So-called top-down cleanrooms are typically constructed on a ground surface with a ceiling construction and with a plurality of upright walls extending between the ground surface and the ceiling construction. A space is thereby delimited substantially airtightly. The ceiling construction has a cavity in which an air treatment module is provided. The ceiling construction has at least one air outlet opening and the upright walls have air channels extending from an air suction opening in a lower zone of the upright wall to the cavity, all this such that air is transportable through the air treatment module from the air suction openings to the air outlet openings in order to circulate and treat air in the space.

[0003] Such a top-down cleanroom is known from EP 2 820 356. In practice, the air treatment modules in such cleanrooms are overdimensioned in order to guarantee a cleanliness in the space. Such cleanrooms are not only expensive, but also energy-inefficient in use.

[0004] It is an object of the invention to provide a cleanroom which is more energy-efficient in cost-efficient manner and wherein the cleanliness in the space is improved.

[0005] According to a first aspect, the invention provides for this purpose a cleanroom comprising an inner chamber, a first outer chamber and a second outer chamber. Provided between the inner chamber and the first and second outer chamber is respectively a first wall and a second wall. Each wall is provided with a plurality of openings which are arranged distributed in a height and width direction of the wall. At least two of the plurality of openings are each provided with an air control means. Each air control means is individually configured to control an air flow rate through the respective opening. The air control means are configured to provide the inner chamber with clean air from at least one of the first and second outer chamber in order to realize a primarily horizontal clean airflow in the inner chamber.

[0006] Because the first and second wall are each provided with a plurality of openings and at least two of the plurality of openings are each provided with an air control means, an airflow which is directed primarily horizontally can be realized. This airflow is furthermore controllable because the air control means are configured to control an air flow rate through the corresponding opening. Such a primarily horizontal airflow, also referred to as cross-flow airflow, has multiple advantages. On the one hand, the direction and the flow profile can be adapted to the requirement in the inner chamber. On the other hand, the cross-flow airflow has the advantage that it is a purified airflow which flows along almost all surfaces. Products and/or processes in the space are hereby protected against contamination. Stagnation of contamination at obstacles, for instance accumulation of contaminating particles, is substantially prevented because the airflow blows horizontally along or over surfaces of the obstacles. In this way contaminating particles not only come away from a surface of an obstacle in the inner chamber, but the contaminating particles are also discharged substantially parallel relative to the obstacle. In contrast to a top-down airflow, almost no turbulence is furthermore created at a work surface because the airflow flows substantially parallel to this work surface. Activities above products are furthermore also less risky because the airflow discharges potential contaminating particles away from the products instead of blowing them down onto the products. Because the primarily horizontal airflow discharges contaminating particles in improved manner, the air control means can furthermore function more energy-efficiently. This is understood to mean that the air control means can realize at least the same cleanliness or improved cleanliness in the space at a lower air flow rate. In this way the cleanroom is therefore more energy-efficient, this thus also resulting in lower operational costs. The cleanroom can also be manufactured more cost-efficiently because smaller air control means can be provided as compared to a top-down cleanroom. Yet another advantage hereof is that the air control means produce a lower noise level. An operator in the inner chamber is thus better able to concentrate on the product and/or process, and will furthermore also tire less quickly. On the other hand, the cross-flow airflow has the advantage that no air treatment modules need be mounted in the ceiling construction. This allows a space to be purified to be optimally utilized in a height direction or the cleanroom to be integrated in existing buildings in simpler manner and more compactly. Because the air control means are individually configured to control an air flow rate through the respective opening, the cleanroom has yet another advantage. A flow direction of the primary horizontal airflow is partially controllable by having for instance one of the at least two air control means control a lower air flow rate through the opening. The primarily horizontal airflow will then be supplied mainly from the other of the at least two air control means. This allows the cross-flow airflow to be concentrated close to obstacles in the space.

[0007] The cleanroom preferably further comprises a control device which is configured to create a digital twin of at least the inner chamber, to simulate an airflow profile in the inner chamber on the basis of the digital twin, and to individually control the air control means in the cleanroom on the basis of the simulated airflow profile. A digital twin is defined as a virtual representation of the cleanroom. The digital twin comprises a virtual representation of the chamber and one or more objects in the inner chamber, for instance a table, production device or person. The digital twin allows an airflow profile of the primarily horizontal airflow in the inner chamber to be simulated and the air control means to be controlled in accordance therewith. This allows the airflow profile to be optimized, for instance depending on the objects present in the inner chamber. When optimizing the airflow profile, the cleanliness in the inner chamber is further improved and the energy consumption of the cleanroom can be further reduced because the air control means can be utilized in accordance with the practical situation. Because the cleanroom is adaptable to almost any practical situation, the cleanroom can be applied very widely without compromising the cleanliness in the inner chamber here.

[0008] The control device is preferably further configured to simulate an interaction of the airflow with an object present in the inner chamber during the simulation of the airflow profile in order to determine a parameter which is representative of a concentration of contaminating particles close to the object. In this way problem situations can be brought to light so that a corresponding action can be undertaken. The control device is thus more preferably further configured to control the air control means, this such that the concentration of contaminating particles is reduced, when the parameter of contaminating particles lies above a predetermined threshold value. This allows the cleanroom to be controlled in targeted and efficient manner. The control device more preferably controls the air control means such that the airflow flows at least partially along or close to the object. This makes it possible for the airflow profile of the cross-flow airflow in the inner chamber to be utilized optimally to discharge the contaminating particles from the inner chamber in targeted manner.

[0009] The cleanroom further preferably comprises an input device which is configured to obtain an input from the inner chamber. The control device is further configured to create the digital twin on the basis of the obtained input. An input can be an image, for instance obtained from a camera. An input can also be a position input from a position sensor which provides feedback about the position of for instance a person in the inner chamber. Such inputs allow the control of the cleanroom to be expanded to a live environment. In other words, the input allows the control device to take into consideration a changing situation in the cleanroom, for instance when an operator moves from a production device to a different production device.

[0010] The air control means preferably comprise one of a blow and suction nozzle which is configured to control the respective airflow. The blow and suction nozzle can control one of an air flow rate and a direction of the airflow.

[0011] The first outer chamber preferably lies opposite the second outer chamber. A substantially unidirectional airflow is realized in this way. This is understood to mean that the airflow from for instance the first wall to the second wall, or vice versa, flows in a primarily unidirectional way.

[0012] The first and second outer chamber are preferably mutually connected by an intermediate chamber. In this way the first, second and intermediate chamber form at least partially a buffer around the inner chamber. Such a buffer is advantageous for flow back from the second outer chamber to the first outer chamber, or vice versa. The buffer chamber is furthermore advantageous for balancing air pressures in the inner chamber and outside the inner chamber. The buffer chamber is further advantageous for performing maintenance on the cleanroom, for instance when a filter must be replaced.

[0013] At least one of the air control means preferably comprises an air cleaning means.

[0014] According to a second aspect, the invention provides a method for purifying a cleanroom comprising an inner chamber, a first outer chamber and a second outer chamber, wherein provided between the inner chamber and the first and second outer chamber is respectively a first wall and a second wall, wherein the method comprises of:

• providing a plurality of openings which are arranged distributed in a height and width direction of the first and second wall;
• providing an air control means at at least two of the plurality of openings;
• individually controlling the air control means in order to control an air flow rate through the respective opening;
• providing clean air from at least one of the first outer chamber and the second outer chamber in order to realize a primarily horizontal clean airflow in the inner chamber.

[0015] The above stated advantages in respect of the cleanroom also apply mutatis mutandis for the method. These advantages will not be repeated for the sake of a brief description.

[0016] The method preferably further comprises of simulating an airflow profile in the inner chamber on the basis of the digital twin; and individually controlling the air control means in the cleanroom on the basis of the simulated airflow profile.

[0017] The method preferably comprises of creating a digital twin of the cleanroom.

[0018] The method preferably comprises of simulating an interaction of the airflow with an object present in the inner chamber during the simulation of the airflow profile and of determining a parameter which is representative of a concentration of contaminating particles close to the object on the basis of the simulated interaction.

[0019] The method preferably comprises of controlling the air control means when the parameter of contaminating particles lies above a predetermined threshold value, all this such that the concentration of contaminating particles is reduced.

[0020] The method preferably comprises of controlling the air control means such that the airflow at least partially forms an airflow profile which flows along or close to the object.

[0021] The method preferably comprises of obtaining an input from the inner chamber; and creating the digital twin on the basis of the obtained input.

[0022] According to a third aspect, the invention provides for a use of a digital twin of a cleanroom as described above for controlling the purification of the cleanroom.

[0023] The invention will now be further described on the basis of an exemplary embodiment shown in the drawing.

[0024] In the drawing:

figure 1 is a schematic view of a cross-section of a cleanroom according to an exemplary embodiment;

figure 2 is a schematic view of a cross-section of a cleanroom according to a further exemplary embodiment, as seen from above;

figure 3 is a perspective view of a cleanroom which is partially transparent.

[0025] The following detailed description relates to determined specific embodiments. The teaching hereof can however be applied in different ways. The same or similar elements are designated in the drawings with the same reference numerals.

[0026] The present invention will be described with reference to specific embodiments. The invention is however not limited thereto, but solely by the claims.

[0027] As used here, the singular forms "a" and "the" comprise both the singular and plural references, unless clearly indicated otherwise by the context.

[0028] The terms "comprising", "comprises" and "composed of' as used here are synonymous with "including". The terms "comprising", "comprises" and "composed of' when referring to stated components, elements or method steps also comprise embodiments which "consist of' the components, elements or method steps.

[0029] The terms first, second, third and so on are further used in the description and in the claims to distinguish between similar elements and not necessarily to describe a sequential or chronological order, unless this is specified. It will be apparent that the thus used terms are mutually interchangeable under appropriate circumstances and that the embodiments of the invention described here can operate in an order other than described or illustrated here.

[0030] Reference in this specification to "one embodiment", "an embodiment", "some aspects", "an aspect" or "one aspect" means that a determined feature, structure or characteristic described with reference to the embodiment or aspect is included in at least one embodiment of the present invention. The manifestations of the sentences "in one embodiment", "in an embodiment", "some aspects", "an aspect" or "one aspect" in different places in this specification thus do not necessarily all refer to the same embodiment or aspects. As will be apparent to a skilled person in this field, the specific features, structures or characteristics can further be combined in any suitable manner in one or more embodiments or aspects. Although some embodiments or aspects described here comprise some but no other features which are included in other embodiments or aspects, combinations of features of different embodiments or aspects are further intended to fall within the context of the invention and to form different embodiments or aspects, as would be apparent to the skilled person. In the appended claims all features of the claimed embodiments or aspects can for instance be used in any combination.

[0031] In the context of this application a cleanroom is defined as a space in which the concentration of contaminating particles is regulated and classified and which is constructed in such a manner as to reduce the introduction, generation and retention of contaminating particles in the space.

[0032] In the context of this application a digital twin is defined as a virtual representation of the cleanroom.

[0033] Figure 1 shows a schematic view of a cross-section of a cleanroom 100 according to an embodiment. The cleanroom 100 comprises an inner chamber 110, a first outer chamber 120, and a second outer chamber 130. The inner chamber 110 is separated from the first outer chamber 120 by a first wall 141. The first wall 141 is thus situated between the first outer chamber 120 and the inner chamber 110. The inner chamber 110 is separated from the second outer chamber 130 by a second wall 142. The second wall 142 is thus situated between the second outer chamber 130 and the inner chamber 110. Although not shown in figure 1, the inner chamber is bounded by a plurality of further walls, see for instance figure 3. The inner chamber 110 is further bounded by a bottom surface V and a ceiling P. The ceiling P can be a false ceiling forming a plenum. A plenum is typically used for top-down cleanrooms. Such an example is further discussed in detail in relation to figure 2.

[0034] The first and second outer chamber 120, 130 are preferably positioned opposite each other, as shown in figure 1. More specifically, the first and the second outer chamber 120, 130 can be positioned on opposite sides of the inner chamber 110. The first and second outer chamber 120, 130 can however also be positioned adjacently of each other. The first and second wall 141, 142 intersect each other in this way. It will further be apparent that a plurality of further outer chambers can be provided, for instance a third outer chamber as shown in figure 3.

[0035] Each wall 141, 142 is provided with a plurality of openings 150. The plurality of openings 150 connect the first outer chamber 120 and the inner chamber 110 to each other. The plurality of openings 150 allow exchange of air between the first outer chamber 120, the second outer chamber 130 and the inner chamber 110. The plurality of openings 150 are arranged distributed in a height and/or width direction of the wall 141, 142. In figure 1 three openings 150 are provided in each of the first wall 141 and the second wall 142. The three openings 150 lie at a mutual distance as seen in a height direction of the wall 141, 142. The three openings 150, shown in figure 1, are provided at a fixed mutual distance. The distance between each of the plurality of openings need however not be a fixed distance, but can also be a differing distance. Although the perspective of figure 1 does not allow a plurality of openings which are arranged distributed as seen in a width direction of the wall 141, 142 to be shown, such an exemplary embodiment is shown in figure 3.

[0036] At least two of the plurality of openings 150 are each provided with an air control means 160. Examples of an air control means 160 are a fan, and air valve or a multi-leaf damper. In figure 1 the air control means 160 in first wall 141 are illustrated as fans and the air control means 160 in second wall 142 are illustrated as air valve. Each air control means 160 is individually configured to control an air flow rate through the respective opening. A fan can thus for instance be provided with a frequency controller which allows the fan to be controlled to determine an air flow rate through the opening 150. An air valve or a multi-leaf damper can for instance comprise a flow rate sensor which measures the air flow rate through the opening and opens or closes the air valve or the multi-leaf damper in accordance with the measurement.

[0037] The air control means 160 are further configured to provide inner chamber 110 with clean air from at least one of the first and second outer chamber 120, 130. Clean air from first outer chamber 120 can for instance be provided via the plurality of openings in first wall 141 to inner chamber 110. According to said example, the area in inner chamber 110 can be discharged to the second outer chamber 130. It will be apparent that clean air can also be provided from second outer chamber 130 to inner chamber 110. In this way a primarily horizontal clean airflow S is realized in inner chamber 110. The airflow is designated in the figure with reference letter S. Because the first and second wall 141, 142 are each provided with a plurality of openings 150 and at least two of the plurality of openings 150 are each provided with an air control means 160, an airflow S which is directed primarily horizontally can be realized. This is understood to mean that the main direction of the airflow S is directed horizontally, although it will be apparent that, as further elucidated with reference to figures 2 and 3, the airflow S can have a curve or a bend. The curve or the bend can be oriented both in a horizontal plane and in a vertical plane. A distinction can however always be made between the primary horizontal airflow S and a top-down airflow. The top-down airflow is directed primarily vertically. When the first and second outer chamber 120, 130 are situated opposite each other, as shown in the example of figure 1, the realized primarily horizontal airflow is unidirectional. This is understood to mean that the airflow flows from for instance the first wall 141 to the second wall 142, or vice versa, in a primarily unidirectional way. This airflow is furthermore controllable because the air control means are configured to control an air flow rate through the corresponding opening. Such a primarily horizontal airflow has multiple advantages. On the one hand, the direction and the flow profile can be adapted to the requirement in the inner chamber. In this way the cleanroom 100 is therefore more energy-efficient, this thus also resulting in lower operational costs. The cleanroom 100 can also be manufactured more cost-efficiently because smaller air control means 160 can be provided as compared to a top-down cleanroom. Because the air control means 160 can realize at least the same cleanliness at a lower air flow rate, the air control means 160 produce a lower noise level. An operator in the inner chamber 110 is thus better able to concentrate on the product and/or process, and will furthermore also tire less quickly. On the other hand, the cross-flow airflow S has the advantage that no air treatment modules need be mounted in the ceiling construction P. This allows an inner chamber 110 to be purified to be optimally utilized in a height direction or the cleanroom 100 to be integrated in existing buildings in simpler manner and more compactly.

[0038] Providing clean air to one of the first outer chamber 120 and the second outer chamber 130 is known to the skilled person and, for the sake of a brief description, is not further elucidated. Providing clean air can for instance take place in the same way as in a top-down cleanroom.

[0039] Figure 1 further shows that, according to a preferred embodiment, the cleanroom 100 further comprises a control device 200. The control device 200 is configured to create a digital twin of at least the inner chamber 110. The digital twin can also comprise the air control means and/or the first and second outer chamber. A digital twin is defined as a virtual representation of the cleanroom 100. The digital twin can be a virtual representation of only the inner chamber 110, but can also be a virtual representation of the inner chamber 110 in combination with the first and second outer chamber 120, 130, optionally in combination with the air control means 160. It will be apparent that further peripheral equipment such as purification installations can also be comprised in the virtual representation of the digital twin.

[0040] The control device 200 is further configured to simulate an airflow profile in the inner chamber 110 on the basis of the digital twin. The airflow profile can for instance be simulated using Computational Fluid Dynamics (CFD). The flow of a fluid, in this case a gas in the form of air, is here simulated by numerically solving flow equations. In other words, a path of the airflow in the inner chamber 110 is modelled taking into consideration the device or presence of persons in the inner chamber 110. The digital twin thus allows an airflow profile of the primarily horizontal airflow in inner chamber 110 to be simulated. In this way flow problems which might occur in practice can be anticipated. The airflow profile can thus be optimized.

[0041] The control device 200 is further configured to control the air control means 160 individually on the basis of the simulated airflow profile. The optimized airflow profile further improves the cleanliness in inner chamber 110. This furthermore allows the air control means 160 to be utilized individually in improved manner so that the energy consumption of cleanroom 100 is further reduced. In this way the cleanroom 100 is adaptable to almost any practical situation without compromising the cleanliness in the inner chamber here. Cleanroom 100 is furthermore adaptable without physical changes to the cleanroom having to be carried out here, for instance rearranging of the inner chamber. This allows the cleanroom 100 to be applied very widely.

[0042] Figure 2 shows a schematic view of a cross-section of a cleanroom 100 according to a further exemplary embodiment. Figure 2 further shows that the cleanroom 100 is preferably configured to simulate an interaction of the airflow S with an object O present in the inner chamber 110 during the simulation of the airflow profile. A parameter which is representative of a concentration of contaminating particles close to the object O is determined in this way. The parameter may be an indication of turbulence or a shortage of airflow close to the object O. Such turbulence or shortage of airflow may indicate the presence of contaminating particles. In this way problem situations can be brought to light so that a corresponding action can be undertaken. The parameter can also be representative of a degree of cleanliness, optionally close to an object. This degree of cleanliness can correspond to cleanliness levels. Such levels of cleanliness are typically classified in accordance with so-called ISO (International Organization for Standardization) standards.

[0043] The control device 200 is further configured to control the air control means 160 on the basis of the parameter. The control device 200 is preferably configured to control the air control means 160 when the parameter of the contaminating particles lies above a predetermined threshold value, all this such that the concentration of contaminating particles is reduced. It is further noted that, depending on the selected parameter, the parameter can also lie below a predetermined threshold value. The simulation can for instance indicate that the airflow does not flow along the object O to sufficient extent. Contaminating articles will stagnate at this location and create a contaminated area. In such a situation the parameter of the contaminating particles which is representative of the concentration thereof lies above the permitted threshold value. In said example a parameter which is related to the flow speed of the airflow however lies below a predetermined threshold value. Both the parameter which is directly related to the concentration of contaminating particles and the parameter which is related to the flow speed of the airflow can indicate a concentration of contaminating particles, whether directly or not.

[0044] Control device 200 is configured to reduce the concentration of contaminating particles. The concentration of contaminating particles is preferably minimized. Control device 200 is for this purpose configured to control the air control means. Control device 200 controls air control means 160, this such that the purified airflow flows along a location where, during the simulation, the digital twin indicates the presence of contaminating particles. It is noted that not all cleanrooms need guarantee the same cleanliness, since there are different categories of cleanroom. The parameter can be set depending on the intended objective of the cleanroom 100.

[0045] The control device 200 is further configured to control the air control means 160 so that the airflow flows at least partially along or close to the object O. This is illustrated in figure 2 by the broken lines designated with reference letter S. Control device 200 simulates an interaction of the airflow S with the object O present in the inner chamber 110. The object is for instance a production device or a person. The example shown in the figure shows a box which forms an obstacle O in the inner chamber 110. The obstacle forms a concentration of contaminating particles, indicated in the figure using a cloud. In order to obtain an improved purification around the box, control device 200 individually controls each of the air control means 160 in the first wall 141. The uppermost air control means for instance remains unchanged, while the lower two air control means are directed toward the uppermost air control means in the second wall 142. It will be apparent that the air control means 160 can also make the airflow flow along the box or close to the box. It is not necessary for the air control means 160 to direct the airflow, a similar primarily horizontal airflow can also be obtained by closing one or more air control means 160, for instance the bottom two control means 160 in the second wall 142. It is preferred for the air control means 160 to comprise one of a blow nozzle and suction nozzle. The blow or suction nozzle is configured to control the respective airflow. The blow nozzle of the lowermost air control means in the first wall 141 can for instance be directed toward a suction nozzle of the upper air control means in the second wall 142. The primary direction of the created airflow is still horizontal, and thus has the above stated advantages.

[0046] The cleanroom 100 can further comprise an input device (not shown) which is configured to obtain an input from the inner chamber 110. The control device 200 is further configured to create the digital twin on the basis of the obtained input. An input can be an image, for instance obtained from a camera. The camera can for instance detect a movement of a person in inner chamber 110 or a current actual situation in inner chamber 110. An input can however also be a position input from a position sensor which provides feedback about the position of for instance a person in the inner chamber. Such inputs allow the control of cleanroom 100 to be expanded to a live environment. In other words, the input allows control device 200 to take into consideration a changing situation in the cleanroom, for instance when an operator moves from a production device to a different production device. The cleanroom 100 can thus be adapted more freely to a current actual situation in the inner chamber 110 so that, even in the case of changing situations, a cleanliness in inner chamber 110 can be guaranteed. Cleanroom 100 can further also comprise a sensor for measuring a cleanliness in one of the inner chamber, one of either the first and second outer chamber and the intermediate chamber, or a combination thereof. The sensor can also be configured to measure the cleanliness of the airflow. The sensor can further function as input means which provides information regarding the currently actual cleanliness level to the digital twin.

[0047] Figure 2 further shows that the first outer chamber and the second outer chamber 120, 130 are mutually connected by an intermediate chamber 170. The intermediate chamber 170 connects the first and second outer chamber 120, 130. In this way the first, second and intermediate chamber 120, 130 and 170 form at least partially a buffer around the inner chamber 110. Such a buffer is advantageous for balancing air pressures in the inner chamber 110 and outside the inner chamber. This for instance allows the air pressure in the inner chamber to be set higher than an air pressure outside inner chamber 110. This prevents contaminating particles from entering. A better balance around inner chamber 110 and in inner chamber 110 results in a more efficient use of the air control means 160 and results in a reduced energy consumption of cleanroom 100. The intermediate chamber 170 can for instance serve to provide a return feed of purified air from the second outer chamber 130 to the first outer chamber 120. In such a situation it is advantageous for one or more of the openings to be provided with an air purifying means.

[0048] Figure 3 shows a perspective view of a cleanroom 100. The cleanroom 100 comprises an inner chamber 110, two outer chambers 120, 130 and an intermediate chamber 170. The cleanroom 100 is further provided with an intermediate chamber 150 above the inner chamber 110. Air control means are provided at openings in each of the walls between the first outer chamber 120 and inner chamber 110 and the second outer chamber 130 and inner chamber 110. The wall between inner chamber 110 and intermediate chamber 170 is free from openings. The intermediate chamber 170 further increases the buffer around inner chamber 110. This further simplifies balancing of the air control means 160. The outer chambers 120, 130 and the intermediate chamber 170 can further for instance be utilized for maintenance of the air control means 160. The air control means 160 which are provided in each of the above stated walls can be easily reached in the outer chambers as compared to air treatment modules which are arranged in the ceiling. This therefore simplifies maintenance when an air cleaning means needs to be replaced, for example.

[0049] Figure 3 further shows that the air control means can be provided at more than two openings. More specifically at four openings in each of said walls. The four openings are distributed both in a height direction and in a width direction of the wall. The example shown in figure 2 is shown once again in figure 3.

[0050] The obstacle O is arranged in the inner chamber 110 shown in figure 3. The obstacle O can for instance be a table. The primarily horizontal airflow is indicated using the broken lines. Figure 3 clearly shows that the air control means 160 are controlled on the basis of the interaction of the airflow with the object O so that the airflow flows at least partially along or close to the object O.

[0051] The skilled person will appreciate on the basis of the above description that the invention can be embodied in different ways and on the basis of different principles. The invention is not limited here to the above described embodiments. The above described embodiments and the figures are purely illustrative and serve only to increase understanding of the invention. The invention is not therefore limited to the embodiments described herein, but is defined in the claims.

Claims

1. A cleanroom (100) comprising an inner chamber (110), a first outer chamber (120) and a second outer chamber (130), wherein provided between the inner chamber and the first and second outer chamber is respectively a first wall (141) and a second wall (142), wherein each wall is provided with a plurality of openings (150) which are arranged distributed in a height and width direction of the wall, characterized in that at least two of the plurality of openings (150) are each provided with an air control means (160) which is configured individually to control an air flow rate through the respective opening, wherein the air control means are configured to provide the inner chamber with clean air from at least one of the first and second outer chamber in order to realize a primarily horizontal clean airflow in the inner chamber.

2. The cleanroom (100) according to the foregoing claim, characterized in that the cleanroom further comprises a control device (200) which is configured to:

- create a digital twin of at least the inner chamber;

- simulate an airflow profile in the inner chamber on the basis of the digital twin; and

- individually control the air control means in the cleanroom on the basis of the simulated airflow profile.

3. The cleanroom (100) according to the foregoing claim, characterized in that the control device is further configured to simulate an interaction of the airflow with an object present in the inner chamber during the simulation of the airflow profile in order to determine a parameter which is representative of a concentration of contaminating particles close to the object.

4. The cleanroom (100) according to the foregoing claim, characterized in that the control device is further configured to control the air control means, this such that the concentration of contaminating particles is reduced, when the parameter of contaminating particles lies above a predetermined threshold value.

5. The cleanroom (100) according to the foregoing claim, characterized in that the control device controls the air control means so that the airflow flows at least partially along or close to the object.

6. The cleanroom according to any one of the claims 2-5, characterized in that the cleanroom further comprises an input device which is configured to obtain an input from the inner chamber; and wherein the control device is configured to create the digital twin on the basis of the obtained input.

7. The cleanroom according to any one of the foregoing claims, wherein the air control means comprise one of a blow and suction nozzle which is configured to control the respective airflow.

8. The cleanroom according to any one of the foregoing claims, wherein the first outer chamber lies opposite the second outer chamber, and/or wherein the first and second outer chamber are mutually connected by an intermediate chamber (170).

9. A method for purifying a cleanroom comprising an inner chamber, a first outer chamber and a second outer chamber, wherein provided between the inner chamber and the first and second outer chamber is respectively a first wall and a second wall, wherein the method comprises of:

- providing a plurality of openings (150) which are arranged distributed in a height and width direction of the first and second wall;

characterized by

- providing an air control means at at least two of the plurality of openings;

- individually controlling the air control means in order to control an air flow rate through the respective opening;

- providing clean air from at least one of the first outer chamber and the second outer chamber in order to realize a primarily horizontal clean airflow in the inner chamber.

10. The method according to the foregoing claim, characterized by:

- simulating an airflow profile in the inner chamber on the basis of the digital twin; and

- individually controlling the air control means in the cleanroom on the basis of the simulated airflow profile.

11. The method according to the foregoing claim, characterized by the creation of a digital twin of the cleanroom.

12. The method according to any one of the foregoing claims 10-11, characterized by

- simulating an interaction of the airflow with an object present in the inner chamber during the simulation of the airflow profile;

- determining a parameter which is representative of a concentration of contaminating particles close to the object on the basis of the simulated interaction.

13. The method according to the foregoing claim, characterized by controlling the air control means when the parameter of contaminating particles lies above a predetermined threshold value, all this such that the concentration of contaminating particles is reduced.

14. The method according to the foregoing claim, characterized by controlling the air control means such that the airflow at least partially forms an airflow profile which flows along or close to the object.

15. The method according to any one of the claims 10-14, characterized by obtaining an input from the inner chamber; and
creating the digital twin on the basis of the obtained input.

Drawing