EP 0129709 A3 19850306 - COMBINATIONAL MOLECULAR PUMP CAPABLE OF READILY BEING CLEANED
Title (en)
COMBINATIONAL MOLECULAR PUMP CAPABLE OF READILY BEING CLEANED
Publication
Application
Priority
JP 7370683 A 19830426
Abstract (en)
[origin: EP0129709A2] In a molecular pump comprising a pump vessel (11) having inlet and outlet ports (13 and 14), an axial-flow type molecular pump member (20) disposed near the inlet port, and an additional pump member (30) of a helical groove type disposed near the outlet port, the additional pump member comprises an inside cylindrical member (31) rotatable around a center axis of the pump vessel and an outside cylindrical member (32) held on an inner surface of the pump vessel. An additional cylindrical member (32a) is situated near the outlet port and brought into contact with the outside cylindrical member. The additional cylindrical member is separable into a plurality of separate pieces each of which is radially detachable from another. The additional cylindrical member is independent of the outside cylindrical member. Alternatively, the additional cylindrical member may be integral with the outside cylindrical member cut into separate pieces.
IPC 1-7
IPC 8 full level
F04D 19/04 (2006.01)
CPC (source: EP)
F04D 19/046 (2013.01)
Citation (search report)
- [A] DE 2218615 A1 19731031 - LEYBOLD HERAEUS GMBH & CO KG
- [A] DD 129822 A1 19780208 - WERNER HARRY
Designated contracting state (EPC)
CH DE FR GB IT LI
DOCDB simple family (publication)
DOCDB simple family (application)
EP 84105770 A 19840521