EP 0231531 A2 19870812 - Method and apparatus for tuning microwave transmission windows.
Title (en)
Method and apparatus for tuning microwave transmission windows.
Title (de)
Anpassungsverfahren und -vorrichtung eines Mikrowellen durchlassenden Fensters.
Title (fr)
Procédé et dispositif d'adaptation d'une fenêtre transparente aux micro-ondes.
Publication
Application
Priority
US 82547186 A 19860203
Abstract (en)
A method and apparatus for tuning a microwave transmission window (160) to maximize and stabilize the power transmitted therethrough. The power transmitted through the window is tuned by adding a pair of tuning structures (164, 166) to the window, which are tuned to transmit the power required to achieve the required deposition conditions. The tuning structures are formed by stacking a plurality of segments (168) of dielectric material adjacent the outer edge of the window. The dimensions of the tuning structure, both width and height, are adjusted to achieve both a high transmission coefficient and a stable plasma excitation.
IPC 1-7
IPC 8 full level
H01L 21/205 (2006.01); H01L 21/302 (2006.01); H01L 21/3065 (2006.01); H01L 21/31 (2006.01); H01P 1/08 (2006.01)
CPC (source: EP)
H01P 1/08 (2013.01)
Designated contracting state (EPC)
AT BE CH DE ES FR GB GR IT LI LU NL SE
DOCDB simple family (publication)
EP 0231531 A2 19870812; EP 0231531 A3 19881005; JP S62219524 A 19870926
DOCDB simple family (application)
EP 86118180 A 19861231; JP 2227187 A 19870202