EP 0238397 B1 19900523 - ELECTRONIC CYCLOTRON RESONANCE ION SOURCE WITH COAXIAL INJECTION OF ELECTROMAGNETIC WAVES
Title (en)
ELECTRONIC CYCLOTRON RESONANCE ION SOURCE WITH COAXIAL INJECTION OF ELECTROMAGNETIC WAVES
Publication
Application
Priority
FR 8603583 A 19860313
Abstract (en)
[origin: US4780642A] Electron cyclotron resonance ion source having an enclosure containing a plasma of ions and electrons formed by electron cyclotron resonance from a sample. The enclosure is connected to a transition cavity by a first conductive duct, and by a second conductive duct traversing the cavity and the first duct. The sample is introduced into the enclosure by the second duct, and the cavity is laterally connected to a vacuum source and to an electromagnetic wave generator by a tight, transparent window.
IPC 1-7
IPC 8 full level
G21K 1/00 (2006.01); H01J 27/08 (2006.01); H01J 27/18 (2006.01); H01J 37/08 (2006.01); H05H 1/46 (2006.01)
CPC (source: EP US)
H01J 27/18 (2013.01 - EP US)
Designated contracting state (EPC)
BE DE GB NL
DOCDB simple family (publication)
EP 0238397 A1 19870923; EP 0238397 B1 19900523; DE 3762936 D1 19900628; FR 2595868 A1 19870918; FR 2595868 B1 19880513; JP 2637094 B2 19970806; JP S62229641 A 19871008; US 4780642 A 19881025
DOCDB simple family (application)
EP 87400536 A 19870311; DE 3762936 T 19870311; FR 8603583 A 19860313; JP 5701687 A 19870313; US 2112487 A 19870303