EP 0250613 B1 19910717 - CRYOPUMP AND METHOD OF OPERATING THIS CRYOPUMP
Title (en)
CRYOPUMP AND METHOD OF OPERATING THIS CRYOPUMP
Publication
Application
Priority
EP 86108529 A 19860623
Abstract (en)
[origin: US4757689A] The invention relates to a cryopump having a casing (1), a gas inlet opening (8) to which a chamber (30) can be attached through a valve (31), a vacuum pump (18) connected through a valve (16) to the casing, a two-stage refrigerator (4) in the casing as cold source, and pumping surfaces (7, 9, 12, 13) which, on both of the refrigeration stages (5, 11) of the refrigerator, are equipped with an electrical heating means (23, 24). To achieve a great shortening of the time required for regeneration and start-up it is proposed that a sensor (41) be provided to monitor the pressure within the pump casing, and that a control unit (28) be present by which the operation of the cryopump can be monitored and controlled on the basis of the signals supplied by the sensor.
IPC 1-7
IPC 8 full level
F04B 37/08 (2006.01)
CPC (source: EP US)
F04B 37/08 (2013.01 - EP US); Y10S 417/901 (2013.01 - EP US)
Designated contracting state (EPC)
CH DE FR GB IT LI NL
DOCDB simple family (publication)
EP 0250613 A1 19880107; EP 0250613 B1 19910717; DE 3680335 D1 19910822; US 4757689 A 19880719; US 4757689 B1 19960702
DOCDB simple family (application)
EP 86108529 A 19860623; DE 3680335 T 19860623; US 92203486 A 19861022