Global Patent Index - EP 0545064 A3

EP 0545064 A3 19930804 - DEVICE FOR FILTERING CHARGED PARTICLES, ENERGY FILTER, ANALYSER USING SUCH AN ENERGY FILTER, ELECTRON-BOMBARDMENT ION SOURCE AND ANALYSER USING SAID ELECTRON-BOMBARDMENT ION SOURCE

Title (en)

DEVICE FOR FILTERING CHARGED PARTICLES, ENERGY FILTER, ANALYSER USING SUCH AN ENERGY FILTER, ELECTRON-BOMBARDMENT ION SOURCE AND ANALYSER USING SAID ELECTRON-BOMBARDMENT ION SOURCE

Publication

EP 0545064 A3 19930804 (DE)

Application

EP 92118282 A 19921026

Priority

CH 353691 A 19911202

Abstract (en)

[origin: EP0545064A2] On an energy filter, ions on the inlet side are deflected by means of a first electrostatic field between electrodes (3a', 3b'), passed through a space (15) which is free of field and enter through a screen (11) a further electrostatic deflection field between electrodes (7a', 3b'). The axes (AE, AA) of the beam inlet and outlet are aligned and are offset with respect to the rotation axis (A'Z) of the cylinder forming the outermost electrode (7a'). <IMAGE>

IPC 1-7

H01J 49/48; H01J 49/14; H01J 27/20

IPC 8 full level

H01J 49/22 (2006.01); H01J 27/20 (2006.01); H01J 49/14 (2006.01); H01J 49/48 (2006.01)

CPC (source: EP US)

H01J 27/20 (2013.01 - EP US); H01J 49/14 (2013.01 - EP US); H01J 49/482 (2013.01 - EP US); H01J 49/484 (2013.01 - EP US)

Citation (search report)

  • [YD] EP 0223520 A1 19870527 - VG INSTR GROUP [GB]
  • [X] SOVIET INVENTIONS ILLUSTRATED, Woche 9004, 7. März 1990, Nr. N90-022454, Derwent Publications Ltd, London, GB; & SU-A-1492 397 (AS USSR ANALYT. INST.) 07-07-1989
  • [Y] REVIEW OF SCIENTIFIC INSTRUMENTS, Band 44, Nr. 7, Juli 1973, Seiten 873-876, New York, US; A.D. McLACHLAN et al.: "A soft X-ray source for photoelectron spectroscopy"
  • [A] SOVIET INVENTIONS ILLUSTRATED, Woche 8905, 15. März 1989, Nr. N89-029047, Derwent Publications Ltd, London, GB; & SU-A-1411 850 (VOLKOV) 23-07-1988

Designated contracting state (EPC)

CH DE FR GB LI

DOCDB simple family (publication)

EP 0545064 A2 19930609; EP 0545064 A3 19930804; EP 0545064 B1 20010808; DE 59209914 D1 20010913; JP 3435179 B2 20030811; JP H05251036 A 19930928; US 5365064 A 19941115

DOCDB simple family (application)

EP 92118282 A 19921026; DE 59209914 T 19921026; JP 32333892 A 19921202; US 98339892 A 19921130