EP 0641934 B1 19961227 - Manufacturing process for a micropump
Title (en)
Manufacturing process for a micropump
Title (de)
Herstellungsverfahren einer Mikropumpe
Title (fr)
Procédé de fabrication d'une micropompe
Publication
Application
Priority
FR 9306281 A 19930524
Abstract (en)
[origin: US5462839A] This process consists of machining a silicon piece (4) by means of selective oxidation operations and photolithography to form therein at least one cavity (7, 12) adapted to contain or convey a fluid, and of oxidizing the wall of the cavity to make this hydrophilic. The device is completed by fixing closing plates (1, 5) to its body thus formed. Prior to the machining operations the surfaces of the piece (4) adapted to be in contact with the closing plates (1, 5) are covered with a screening layer that resists these machining operations. Then, after these have been completed, the surfaces of the piece intended to be exposed to the fluid are oxidized to form therein an oxide layer favoring the wettability of these surfaces. The screening layer is then removed and the closing plates are fixed to the piece. The invention has applications, notably in micropumps.
IPC 1-7
IPC 8 full level
A61J 3/00 (2006.01); A61M 1/14 (2006.01); F04B 43/04 (2006.01); H01L 21/306 (2006.01)
CPC (source: EP US)
F04B 43/046 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE CH DE DK ES FR GB IE IT LI LU NL SE
DOCDB simple family (publication)
US 5462839 A 19951031; AT E146853 T1 19970115; DE 69401250 D1 19970206; DE 69401250 T2 19970710; DK 0641934 T3 19971013; EP 0641934 A1 19950308; EP 0641934 B1 19961227; ES 2099991 T3 19970601; FR 2705693 A1 19941202; FR 2705693 B1 19950728; HK 1006739 A1 19990312; JP 3651809 B2 20050525; JP H0719170 A 19950120; SG 47036 A1 19980320
DOCDB simple family (application)
US 24755094 A 19940523; AT 94107419 T 19940513; DE 69401250 T 19940513; DK 94107419 T 19940513; EP 94107419 A 19940513; ES 94107419 T 19940513; FR 9306281 A 19930524; HK 98106084 A 19980623; JP 12333394 A 19940513; SG 1996003690 A 19940513