EP 0697524 B1 19990310 - Turbomolecular vacuum pump
Title (en)
Turbomolecular vacuum pump
Title (de)
Turbomolekular-Vakuumpumpe
Title (fr)
Pompe à vide turbomoléculaire
Publication
Application
Priority
FR 9410147 A 19940819
Abstract (en)
[origin: EP0697524A1] The turbo-molecular vacuum pump includes a stator (6, 8) and a rotor (1), the rotor including a bell-type active part (3) and a central shaft (5). The stator comprises an external part (6) and an internal part (8) penetrating into the cavity (9) of the bell-shaped active part. The central shaft (5) and the active bell shape of the rotor are formed as a monoblock. The shaft (5) includes a central bore (13) in which is lodges the rotor part of the drive motor, consisting of a cylindrical permanent magnet.
IPC 1-7
IPC 8 full level
F04D 19/04 (2006.01); F04D 25/06 (2006.01)
CPC (source: EP US)
F04D 19/04 (2013.01 - EP US); F04D 25/0606 (2013.01 - EP US)
Designated contracting state (EPC)
DE GB IT
DOCDB simple family (publication)
EP 0697524 A1 19960221; EP 0697524 B1 19990310; DE 69508163 D1 19990415; DE 69508163 T2 19990805; FR 2723767 A1 19960223; FR 2723767 B1 19970103; JP H0868388 A 19960312; US 5542825 A 19960806
DOCDB simple family (application)
EP 95401896 A 19950816; DE 69508163 T 19950816; FR 9410147 A 19940819; JP 21066095 A 19950818; US 51693995 A 19950818