EP 0781921 B1 20020529 - Ion source with closed electron drift
Title (en)
Ion source with closed electron drift
Title (de)
Ionenquelle mit geschlossener Elektronendrift
Title (fr)
Source d'ions à dérive fermée d'électrons
Publication
Application
Priority
FR 9515718 A 19951229
Abstract (en)
[origin: EP0781921A1] The ion source with a closed flow of electrons comprises a main annular ionisation and acceleration channel (122) which is open at its downstream end. At least one internal wall of this channel is made of an electrically conducting material. Terminal pieces (164,165) are held at a potential which is lower than that of the anode (125) extending the annular channel downstream of the anode. The source of ions comprises a hollow cathode (140). A supply of ionisable gas is associated with the cathode (140) and with the anode (125). A circuit is provided to bias the anode, and a further components are provided to create a magnetic field in the region of the main annular channel (122).
IPC 1-7
IPC 8 full level
F03H 1/00 (2006.01); H01J 27/14 (2006.01); H05H 1/54 (2006.01)
CPC (source: EP US)
F03H 1/0075 (2013.01 - EP US); H01J 27/143 (2013.01 - EP US); H05H 1/54 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB IT NL
DOCDB simple family (publication)
EP 0781921 A1 19970702; EP 0781921 B1 20020529; DE 69621411 D1 20020704; DE 69621411 T2 20030109; FR 2743191 A1 19970704; FR 2743191 B1 19980327; UA 43863 C2 20020115; US 5945781 A 19990831
DOCDB simple family (application)
EP 96402873 A 19961223; DE 69621411 T 19961223; FR 9515718 A 19951229; UA 96124917 A 19961226; US 77340196 A 19961226