EP 0815453 A1 19980107 - MECHANICAL RESONANCE, SILICON ACCELEROMETER
Title (en)
MECHANICAL RESONANCE, SILICON ACCELEROMETER
Title (de)
MECHANISCHER RESONANZ-BESCHLEUNIGUNGSMESSER AUS SILIZIUM
Title (fr)
ACCELEROMETRE AU SILICIUM A RESONANCE MECANIQUE
Publication
Application
Priority
US 9503011 W 19950313
Abstract (en)
[origin: WO9628735A1] A silicon accelerometer includes several silicon layers. The silicon layers form two silicon beams supported by flexure members. An accelaration responsive silicon mass is arranged to bend the flexure members in response to accelerations. The silicon beams are vibrated in vacuum chambers and gas damping is provided for the acceleration responsive mass and the flexure members. Sensing electronics detect vibration of the two silicon beams.
IPC 1-7
IPC 8 full level
G01P 15/097 (2006.01); G01P 15/10 (2006.01)
CPC (source: EP)
G01P 15/097 (2013.01); G01P 2015/0828 (2013.01)
Citation (search report)
See references of WO 9628735A1
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 9628735 A1 19960919; CA 2213245 A1 19960919; CA 2213245 C 20041102; EP 0815453 A1 19980107
DOCDB simple family (application)
US 9503011 W 19950313; CA 2213245 A 19950313; EP 95912856 A 19950313