Global Patent Index - EP 0918886 A1

EP 0918886 A1 19990602 - METHOD FOR FORMING A CARBON FILM

Title (en)

METHOD FOR FORMING A CARBON FILM

Title (de)

VERFAHREN ZUR HERSTELLUNG EINES KOHLENSTOFF-FILMS

Title (fr)

PROCEDE DE FORMATION D'UN FILM DE CARBONE

Publication

EP 0918886 A1 19990602 (EN)

Application

EP 98904681 A 19980126

Priority

  • US 9801441 W 19980126
  • US 82137497 A 19970320

Abstract (en)

[origin: WO9841666A1] A method for forming a carbon film includes the step of pulsing an arc (122) within a vacuum arc deposition apparatus (100) having a graphite source (115). The method includes pulsing a current signal (119) from an arc power supply (116). The current signal (119) is within a range of 100-300 amperes. The current signal (119) is pulsed at a power MOSFET switching circuit (200) to provide a pulsed arc signal (120). Pulsed arc signal (120) has a pulse width within a range of 0.5-2 microseconds and within a range of 20-30 % of the period of the pulsed arc signal (120). The pulsed arc signal (120) also has a rise time that is within a range of 5-20 nanoseconds.

IPC 1-7

C23C 14/00

IPC 8 full level

C01B 31/02 (2006.01); C23C 14/00 (2006.01); C23C 14/06 (2006.01); C23C 14/32 (2006.01); H01J 37/32 (2006.01)

CPC (source: EP KR)

C23C 14/00 (2013.01 - KR); C23C 14/0605 (2013.01 - EP); C23C 14/325 (2013.01 - EP); H01J 37/32055 (2013.01 - EP); H01J 37/32064 (2013.01 - EP)

Citation (search report)

See references of WO 9841666A1

Designated contracting state (EPC)

DE FR GB

DOCDB simple family (publication)

WO 9841666 A1 19980924; CN 1220707 A 19990623; EP 0918886 A1 19990602; JP 2001506319 A 20010515; KR 20000015801 A 20000315

DOCDB simple family (application)

US 9801441 W 19980126; CN 98800304 A 19980126; EP 98904681 A 19980126; JP 54048298 A 19980126; KR 19980709350 A 19981119