EP 0918886 A1 19990602 - METHOD FOR FORMING A CARBON FILM
Title (en)
METHOD FOR FORMING A CARBON FILM
Title (de)
VERFAHREN ZUR HERSTELLUNG EINES KOHLENSTOFF-FILMS
Title (fr)
PROCEDE DE FORMATION D'UN FILM DE CARBONE
Publication
Application
Priority
- US 9801441 W 19980126
- US 82137497 A 19970320
Abstract (en)
[origin: WO9841666A1] A method for forming a carbon film includes the step of pulsing an arc (122) within a vacuum arc deposition apparatus (100) having a graphite source (115). The method includes pulsing a current signal (119) from an arc power supply (116). The current signal (119) is within a range of 100-300 amperes. The current signal (119) is pulsed at a power MOSFET switching circuit (200) to provide a pulsed arc signal (120). Pulsed arc signal (120) has a pulse width within a range of 0.5-2 microseconds and within a range of 20-30 % of the period of the pulsed arc signal (120). The pulsed arc signal (120) also has a rise time that is within a range of 5-20 nanoseconds.
IPC 1-7
IPC 8 full level
C01B 31/02 (2006.01); C23C 14/00 (2006.01); C23C 14/06 (2006.01); C23C 14/32 (2006.01); H01J 37/32 (2006.01)
CPC (source: EP KR)
C23C 14/00 (2013.01 - KR); C23C 14/0605 (2013.01 - EP); C23C 14/325 (2013.01 - EP); H01J 37/32055 (2013.01 - EP); H01J 37/32064 (2013.01 - EP)
Citation (search report)
See references of WO 9841666A1
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 9841666 A1 19980924; CN 1220707 A 19990623; EP 0918886 A1 19990602; JP 2001506319 A 20010515; KR 20000015801 A 20000315
DOCDB simple family (application)
US 9801441 W 19980126; CN 98800304 A 19980126; EP 98904681 A 19980126; JP 54048298 A 19980126; KR 19980709350 A 19981119