EP 0939893 A1 19990908 - MINIATURISED PHOTOACOUSTIC SPECTROMETER
Title (en)
MINIATURISED PHOTOACOUSTIC SPECTROMETER
Title (de)
MINIATURISIERTES PHOTOAKUSTISCHES SPEKTROMETER
Title (fr)
SPECTROMETRE PHOTOACOUSTIQUE MINIATURISE
Publication
Application
Priority
- FR 9802003 W 19980918
- FR 9711697 A 19970919
Abstract (en)
[origin: FR2768813A1] An infrared source (18) modulated at about 20 Hz and mirror (24) are formed and sealed (22) between semiconducting substrata (2,4) and a further substrata (6) constitutes a filter. A micro-oven (12) is formed in another substratum (8) which is also used with a final substratum (10) to form a microphone (14) having electrodes (38,39).
IPC 1-7
IPC 8 full level
G01N 29/00 (2006.01); G01N 21/00 (2006.01); G01N 21/17 (2006.01); G02B 26/00 (2006.01)
CPC (source: EP US)
G01N 21/1702 (2013.01 - EP US); G02B 26/001 (2013.01 - EP US)
Citation (search report)
See references of WO 9915879A1
Designated contracting state (EPC)
DE GB IT
DOCDB simple family (publication)
FR 2768813 A1 19990326; FR 2768813 B1 19991022; EP 0939893 A1 19990908; JP 2002511946 A 20020416; US 6344647 B1 20020205; WO 9915879 A1 19990401
DOCDB simple family (application)
FR 9711697 A 19970919; EP 98944020 A 19980918; FR 9802003 W 19980918; JP 51863599 A 19980918; US 29708799 A 19990517