EP 1116266 A1 20010718 - METHOD FOR PRODUCING SELF-POLARIZED FERRO-ELECTRIC LAYERS, ESPECIALLY PZT LAYERS, WITH A RHOMBOHEDRAL CRYSTAL STRUCTURE
Title (en)
METHOD FOR PRODUCING SELF-POLARIZED FERRO-ELECTRIC LAYERS, ESPECIALLY PZT LAYERS, WITH A RHOMBOHEDRAL CRYSTAL STRUCTURE
Title (de)
VERFAHREN ZUR HERSTELLUNG SELBSTPOLARISIERTER FERROELEKTRISCHER SCHICHTEN, INSBESONDERE PZT-SCHICHTEN, MIT RHOMBOEDRISCHER KRISTALLSTRUKTUR
Title (fr)
PROCEDE DE REALISATION DE COUCHES AUTOPOLARISEES FERROELECTRIQUES, EN PARTICULIER DE COUCHES DE PZT (TITANATE ZIRCONATE DE PLOMB), PRESENTANT UNE STRUCTURE CRISTALLINE RHOMBOEDRIQUE
Publication
Application
Priority
- DE 9902754 W 19990901
- DE 19842816 A 19980918
Abstract (en)
[origin: DE19842816C1] The method involves providing a substrate (1) and heating it to a defined temperature T1. A layer (10) with a rhomboid crystal structure is formed on the substrate. The layer comprises a low-metallic self-polarised layer (13) with a Curie temperature TC1 and a highly metallic layer (14) with a Curie temperature TC2, where T1 is greater than TC1, which is greater than TC2. The heating of the substrate is ended and the layer (10) with rhomboid crystal structure is cooled after the forming process has finished.
IPC 1-7
IPC 8 full level
H01L 21/02 (2006.01); H01L 21/316 (2006.01); H01L 21/314 (2006.01)
CPC (source: EP US)
H01L 21/02197 (2013.01 - EP US); H01L 21/02266 (2013.01 - EP US); H01L 21/31691 (2016.02 - US); H01L 28/56 (2013.01 - EP US)
Citation (search report)
See references of WO 0017921A1
Designated contracting state (EPC)
CH DE FR GB IT LI NL
DOCDB simple family (publication)
DE 19842816 C1 20000203; EP 1116266 A1 20010718; US 6440210 B1 20020827; WO 0017921 A1 20000330
DOCDB simple family (application)
DE 19842816 A 19980918; DE 9902754 W 19990901; EP 99953667 A 19990901; US 78737801 A 20010316