EP 1133785 A2 20010919 - DETECTOR CONFIGURATION FOR EFFICIENT SECONDARY ELECTRON COLLECTION IN MICROCOLUMNS
Title (en)
DETECTOR CONFIGURATION FOR EFFICIENT SECONDARY ELECTRON COLLECTION IN MICROCOLUMNS
Title (de)
DETEKTORANORDNUNG ZUR EFFIZIENTEN SEKUNDÄRELEKTRONENSAMMLUNG IN MIKROSAÜLEN
Title (fr)
CONFIGURATION DE DETECTEUR POUR UNE COLLECTION EFFICACE D'ELECTRONS SECONDAIRES DANS DES MICROCOLONNES
Publication
Application
Priority
- US 9927689 W 19991122
- US 19911298 A 19981124
Abstract (en)
[origin: WO0031769A2] A structure and associated method for detecting secondary and backscatter electrons in a microcolumn. A secondary electron detector and a backscatter electron detector, both located upstream of the Einzel (objective) lens in the microcolumn, provide a highly efficient axially symmetric electron detector, short column length, and short working distance. The secondary electron detector is located between the deflection system and the Einzel lens, between the suppressor plate and the Einzel lens, or between the deflection system and the beam-limiting aperture. The backscatter electron detector is located between a beam-limiting aperture and the deflection system and can be incorporated into the aperture. A secondary electron extractor placed between the sample and the Einzel lens further improves the spatial resolution caused by surface imperfection or local surface potential on the sample surface.
IPC 1-7
IPC 8 full level
G01N 23/203 (2006.01); G01N 23/225 (2006.01); G21K 1/087 (2006.01); G21K 5/04 (2006.01); H01J 37/12 (2006.01); H01J 37/244 (2006.01)
CPC (source: EP)
H01J 37/244 (2013.01); H01J 2237/1205 (2013.01)
Citation (search report)
See references of WO 0031769A2
Designated contracting state (EPC)
DE GB NL
DOCDB simple family (publication)
WO 0031769 A2 20000602; WO 0031769 A3 20001109; WO 0031769 A9 20010517; EP 1133785 A2 20010919; JP 2002530833 A 20020917; KR 20010080558 A 20010822
DOCDB simple family (application)
US 9927689 W 19991122; EP 99965863 A 19991122; JP 2000584505 A 19991122; KR 20017006514 A 20010524