EP 1141995 A1 20011010 - ARRAY OF MULTIPLE CHARGED PARTICLE BEAMLET EMITTING COLUMNS
Title (en)
ARRAY OF MULTIPLE CHARGED PARTICLE BEAMLET EMITTING COLUMNS
Title (de)
MATRIX VON LADUNGSTRÄGERSTRAHLEN EMITTIERENDEN SÄULEN
Title (fr)
RESEAU DE COLONNES EMETTANT UNE PLURALITE DE FAISCEAUX DE PARTICULES CHARGEES A TAILLE REDUITE
Publication
Application
Priority
- US 0040809 W 20000831
- US 41049299 A 19990930
Abstract (en)
[origin: WO0126134A1] A lithographic apparatus using an array of charged particle (electron) beam columns, where the array includes a plurality of charged particle beam columns that each selectively expose a target to a plurality of charged particle beams. Each charged particle beam column includes a beam source that selectively generates a plurality of charged particle beams; an anode coaxial with the charged particle beams and that accelerates the plurality of charged particle beams from the beam source; and a lens coaxial with the charged particle beams and that demagnifies the charged particle beams. The beam source is a photocathode array that selectively supplies multiple electron beams when illuminated.
IPC 1-7
IPC 8 full level
G03F 7/20 (2006.01); H01J 37/073 (2006.01); H01J 37/28 (2006.01); H01J 37/30 (2006.01); H01J 37/305 (2006.01); H01J 37/317 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP KR)
B82Y 10/00 (2013.01 - EP); B82Y 40/00 (2013.01 - EP); G03F 7/70375 (2013.01 - EP); H01J 37/30 (2013.01 - KR); H01J 37/3007 (2013.01 - EP); H01J 37/3177 (2013.01 - EP); H01J 2237/31774 (2013.01 - EP); H01J 2237/31779 (2013.01 - EP)
Citation (search report)
See references of WO 0126134A1
Designated contracting state (EPC)
DE GB NL
DOCDB simple family (publication)
WO 0126134 A1 20010412; AU 1960601 A 20010510; EP 1141995 A1 20011010; JP 2003511855 A 20030325; KR 20010089522 A 20011006
DOCDB simple family (application)
US 0040809 W 20000831; AU 1960601 A 20000831; EP 00982596 A 20000831; JP 2001529004 A 20000831; KR 20017006760 A 20010530