EP 1152448 A4 20060419 - ELECTRON TUBE
Title (en)
ELECTRON TUBE
Title (de)
ELEKTRONENSTRAHLRÖHRE
Title (fr)
TUBE ELECTRONIQUE
Publication
Application
Priority
JP 9900213 W 19990121
Abstract (en)
[origin: WO0044027A1] An electron tube (10) is mainly composed of a side tube (12), an input plate (14) having a photocathode (18), a stem (16), and a CCD device (20). The inside of the electron tube (10) is in a high vacuum state. The CCD device (20) is secured to the stem (16), with the back (B) of the CCD device (20) opposed to the photocathode (18). In the CCD device (20), on a semiconductor substrate (64) made of a semiconductor of one conductivity type are formed a buried layer (66), a barrier layer (68), an SiO2 layer (70), a storage electrode layer (72), a transfer electrode layer (74), and a barrier electrode layer (76) in respective predetermined positions. On them, a PSG film (78) is formed over the entire surface (A) to palanarize the surface of the CCD device (20). Further, on the film (78), an SiN film (106) mainly made of SiN is formed over the entire surface (A).
IPC 1-7
IPC 8 full level
H01J 31/26 (2006.01); H01J 31/49 (2006.01)
CPC (source: EP)
H01J 31/26 (2013.01); H01J 31/49 (2013.01); H01J 2231/50073 (2013.01)
Citation (search report)
- [Y] US 4044374 A 19770823 - ROBERTS CHARLES GRADY, et al
- [Y] US 3864724 A 19750204 - KUBO SHUJI, et al
- [A] US 4682021 A 19870721 - FITTS ROBERT W [US]
- [Y] PATENT ABSTRACTS OF JAPAN vol. 018, no. 238 (E - 1544) 6 May 1994 (1994-05-06)
- See references of WO 0044027A1
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 0044027 A1 20000727; AU 2073899 A 20000807; DE 69941131 D1 20090827; EP 1152448 A1 20011107; EP 1152448 A4 20060419; EP 1152448 B1 20090715
DOCDB simple family (application)
JP 9900213 W 19990121; AU 2073899 A 19990121; DE 69941131 T 19990121; EP 99901128 A 19990121