EP 1183723 A1 20020306 - CIRCUIT SUITABLE FOR VERTICAL INTEGRATION AND METHOD OF PRODUCING SAME
Title (en)
CIRCUIT SUITABLE FOR VERTICAL INTEGRATION AND METHOD OF PRODUCING SAME
Title (de)
VERTIKAL INTEGRIERBARE SCHALTUNG UND VERFAHREN ZU IHRER HERSTELLUNG
Title (fr)
CIRCUIT POUVANT ETRE INTEGRE VERTICALEMENT ET SON PROCEDE DE PRODUCTION
Publication
Application
Priority
- DE 19918671 A 19990423
- EP 0003575 W 20000419
Abstract (en)
[origin: DE19918671A1] The invention relates to a circuit suitable for vertical integration and a method of producing same. In contrast to known methods for producing vertical electrical connections, the present method comprises process steps which are also used for the production of the vertically integratable circuit itself and which permit said vertical integration. This simplifies the overall production sequence of vertically integratable circuits and thus of the three-dimensionally integrated circuit as a whole, which in turn optimizes plant run-times since some process steps fall away. Furthermore, since the production of vertical electrical connections is no longer based on the use of finished substrates yields are improved, as process steps which could affect active circuit components already produced, such as steps involving high process temperatures, no longer have to be carried out after the production of said circuit components.
IPC 1-7
IPC 8 full level
H01L 23/52 (2006.01); H01L 21/3205 (2006.01); H01L 21/60 (2006.01); H01L 21/768 (2006.01); H01L 21/98 (2006.01); H01L 25/065 (2006.01); H01L 25/07 (2006.01); H01L 25/18 (2006.01); H01L 27/00 (2006.01)
CPC (source: EP KR US)
H01L 21/283 (2013.01 - KR); H01L 21/76898 (2013.01 - EP US); H01L 25/50 (2013.01 - EP US); H01L 2924/0002 (2013.01 - EP US)
Citation (search report)
See references of WO 0065648A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
DE 19918671 A1 20001102; DE 19918671 B4 20060302; AU 4401700 A 20001110; EP 1183723 A1 20020306; JP 2002543588 A 20021217; KR 100614362 B1 20060911; KR 20020006040 A 20020118; US 7144757 B1 20061205; WO 0065648 A1 20001102
DOCDB simple family (application)
DE 19918671 A 19990423; AU 4401700 A 20000419; EP 0003575 W 20000419; EP 00925226 A 20000419; JP 2000614497 A 20000419; KR 20017013597 A 20011023; US 92637701 A 20011213