EP 1245037 A1 20021002 - AUTOMATED HIGH-DENSITY PLASMA (HDP) WORKPIECE TEMPERATURE CONTROL
Title (en)
AUTOMATED HIGH-DENSITY PLASMA (HDP) WORKPIECE TEMPERATURE CONTROL
Title (de)
AUTOMATISIERTE WERKSTÜCKSTEMPERATURREGELUNG FÜR EINEN PLASMA HOHER DICHTE (HDP)
Title (fr)
REGULATION AUTOMATISEE DE LA TEMPERATURE D'UNE PIECE USINEE AU PLASMA HAUTE DENSITE
Publication
Application
Priority
- US 0025725 W 20000920
- US 47751500 A 20000104
Abstract (en)
[origin: WO0150496A1] A method is provided for manufacturing, the method including processing a workpiece (305) in a high-density plasma (HDP) processing step (310), measuring a parameter (317) characteristic of the HDP processing performed on the workpiece in the HDP processing step (310), and modeling the characteristic parameter measured (330, 335). The method also includes applying the model to modify at least one HDP control input parameter (340, 360, 320).
IPC 1-7
IPC 8 full level
H01J 37/32 (2006.01); H01L 21/31 (2006.01)
CPC (source: EP KR)
H01J 37/32 (2013.01 - KR); H01J 37/32935 (2013.01 - EP); H01J 37/3299 (2013.01 - EP)
Citation (search report)
See references of WO 0150496A1
Designated contracting state (EPC)
AT BE DE GB
DOCDB simple family (publication)
WO 0150496 A1 20010712; EP 1245037 A1 20021002; JP 2003519906 A 20030624; KR 20020063616 A 20020803
DOCDB simple family (application)
US 0025725 W 20000920; EP 00961972 A 20000920; JP 2001550776 A 20000920; KR 20027008704 A 20020704