EP 1280617 A2 20030205 - DEPOSITED THIN FILMS AND THEIR USE IN SEPARATION AND SARCRIFICIAL LAYER APPLICATIONS
Title (en)
DEPOSITED THIN FILMS AND THEIR USE IN SEPARATION AND SARCRIFICIAL LAYER APPLICATIONS
Title (de)
AUFGEBRACHTE DÜNNE SCHICHTEN UND DEREN VERWENDUNG IN SEPARATIONS- UND OPFERSCHICHTANWENDUNGEN
Title (fr)
FILMS MINCES DEPOSES ET LEUR UTILISATION DANS DES APPLICATIONS DE COUCHES SACRIFICIELLES ET DE SEPARATION
Publication
Application
Priority
- US 0112281 W 20010417
- US 19754800 P 20000417
- US 20193700 P 20000505
- US 58010500 A 20000530
- US 20819700 P 20000531
- US 21553800 P 20000630
- US 23162600 P 20000911
- US 23579400 P 20000927
- US 73994000 A 20001219
- US 26820801 P 20010212
Abstract (en)
[origin: WO0180286A2] This invention uses large surface to volume ratio materials for separation, release layer, and sacrificial material applications. The invention outlines the material concept, application designs, and fabrication methodologies. The invention is demonstrated using deposited column/void network materials as examples of large surface to volume ratio materials. In a number of the specific applications discussed, it is shown that it is advantageous to create structures on a laminate on a mother substrate and then, using the separation layer material approach, to separate this laminate from the mother substrate using the present separation scheme. It is also shown that the present materials have excellent release layer utility. In a number of applications it is also shown how the approach can be used to uniquely form cavities, channels, air-gaps, and related structures in or on various substrates. Further, it is demonstrated that it also can be possible and advantageous to combine the schemes for cavity formation with the scheme for laminate separation.
IPC 1-7
IPC 8 full level
B81B 3/00 (2006.01); B81C 1/00 (2006.01); C23C 16/24 (2006.01); C23C 16/511 (2006.01); H01L 21/306 (2006.01); H01M 8/02 (2006.01)
CPC (source: EP)
B81C 1/0038 (2013.01); B81C 99/008 (2013.01); C23C 16/24 (2013.01); C23C 16/511 (2013.01); B81C 2201/0109 (2013.01); B81C 2201/0115 (2013.01); B81C 2203/0127 (2013.01)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 0180286 A2 20011025; WO 0180286 A3 20020207; AU 6102601 A 20011030; CA 2406214 A1 20011025; CN 1427749 A 20030702; EP 1280617 A2 20030205; EP 1280617 A4 20050803; JP 2004507880 A 20040311
DOCDB simple family (application)
US 0112281 W 20010417; AU 6102601 A 20010417; CA 2406214 A 20010417; CN 01808233 A 20010417; EP 01934877 A 20010417; JP 2001577585 A 20010417