EP 1314201 A1 20030528 - METHOD FOR PRODUCING AN ANTIFUSE AND ANTIFUSE FOR ALLOWING SELECTIVE ELECTRICAL CONNECTION OF NEIGHBOURING CONDUCTIVE ZONES
Title (en)
METHOD FOR PRODUCING AN ANTIFUSE AND ANTIFUSE FOR ALLOWING SELECTIVE ELECTRICAL CONNECTION OF NEIGHBOURING CONDUCTIVE ZONES
Title (de)
VERFAHREN ZUR HERSTELLUNG EINER ANTIFUSE UND ANTIFUSE ZUR SELEKTIVEN ELEKTRISCHEN VERBINDUNG VON BENACHBARTEN LEITENDEN BEREICHEN
Title (fr)
PROCEDE DE REALISATION D'UN ANTI-FUSIBLE ET ANTI-FUSIBLE PERMETTANT LA CONNEXION ELECTRIQUE SELECTIVE DE ZONES CONDUCTRICES VOISINES
Publication
Application
Priority
- DE 10043215 A 20000901
- EP 0109427 W 20010816
Abstract (en)
[origin: WO0219426A1] The invention relates to a method for producing antifuse structures and antifuses, which can be selectively electrically connected by neighbouring conductive zones. The inventive method comprises application of a reactive layer (3) on a first conductive zone (2); structuring the reactive layer with the aid of a photolithographic method; application of a fuse layer (5, 6); elimination of a reactive layer; application of a non-conducting layer (7); introduction of an opening into the non-conducting layer and introduction of conductive material into the opening in order to create a second conductive zone (8).
IPC 1-7
IPC 8 full level
H01L 21/3205 (2006.01); H01L 21/82 (2006.01); H01L 23/52 (2006.01); H01L 23/525 (2006.01)
CPC (source: EP KR US)
H01L 21/82 (2013.01 - KR); H01L 23/5252 (2013.01 - EP US); H01L 2924/0002 (2013.01 - EP US)
Citation (search report)
See references of WO 0219426A1
Designated contracting state (EPC)
AT BE CH CY FR GB IE IT LI
DOCDB simple family (publication)
WO 0219426 A1 20020307; DE 10043215 C1 20020418; EP 1314201 A1 20030528; JP 2004508715 A 20040318; JP 4007912 B2 20071114; KR 100508889 B1 20050818; KR 20030020441 A 20030308; TW I226104 B 20050101; US 2003157752 A1 20030821; US 6716678 B2 20040406
DOCDB simple family (application)
EP 0109427 W 20010816; DE 10043215 A 20000901; EP 01958074 A 20010816; JP 2002524223 A 20010816; KR 20037001624 A 20030204; TW 90121644 A 20010831; US 37824303 A 20030303