EP 1342121 A2 20030910 - TWO-DIMENSIONAL MICRO-MIRROR ARRAY ENHANCEMENTS
Title (en)
TWO-DIMENSIONAL MICRO-MIRROR ARRAY ENHANCEMENTS
Title (de)
VERBESSERTE ZWEIDIMENSIONALE MIKROSPIEGEL-ARRAYS
Title (fr)
AMELIORATIONS SE RAPPORTANT A UNE MOSAIQUE DE MICROMIROIRS BIDIMENSIONNELS
Publication
Application
Priority
- US 0105309 W 20010216
- US 18311700 P 20000217
- US 18324600 P 20000217
- US 20361700 P 20000511
- US 20775200 P 20000530
- US 71594500 A 20001116
Abstract (en)
[origin: WO0161400A2] A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to form quadrants. Torsion sensors are provided along the axes of rotation to control deflection of the quadrant deflection electrodes.
IPC 1-7
IPC 8 full level
G02B 26/08 (2006.01)
CPC (source: EP)
G02B 26/0841 (2013.01); G02B 26/085 (2013.01)
Citation (search report)
See references of WO 0161400A2
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 0161400 A2 20010823; WO 0161400 A3 20030710; WO 0161400 A9 20021010; AU 6098601 A 20010827; CA 2400294 A1 20010823; EP 1342121 A2 20030910
DOCDB simple family (application)
US 0105309 W 20010216; AU 6098601 A 20010216; CA 2400294 A 20010216; EP 01934837 A 20010216