EP 1402228 A1 20040331 - INTERFEROMETER SYSTEM, METHOD FOR RECORDING AN INTERFEROGRAM AND METHOD FOR PROVIDING AND MANUFACTURING AN OBJECT WITH A SPECIFIED SURFACE
Title (en)
INTERFEROMETER SYSTEM, METHOD FOR RECORDING AN INTERFEROGRAM AND METHOD FOR PROVIDING AND MANUFACTURING AN OBJECT WITH A SPECIFIED SURFACE
Title (de)
INTERFEROMETERSYSTEM, VERFAHREN ZUM AUFNEHMEN EINES INTERFEROGRAMMS UND VERFAHREN ZUM BEREITSTELLEN UND HERSTELLEN EINES OBJEKTS MIT EINER SOLL-OBERFLÄCHE
Title (fr)
SYSTEME D'INTERFEROMETRE, PROCEDE POUR ENREGISTRER UN INTERFEROGRAMME, PROCEDE POUR PREPARER ET POUR FABRIQUER UN OBJET A SURFACE NOMINALE
Publication
Application
Priority
- DE 10130902 A 20010627
- EP 0207080 W 20020626
Abstract (en)
[origin: WO03002933A1] The invention relates to a interferometer system, comprising a reference surface, a mounting for an object which provides an object surface, a radiation source for emitting radiation of an adjustable frequency onto the reference and object surfaces, a positioning radiation detector and a control mechanism for adjusting a plurality of various frequencies of the radiation emitted by the radiation source. Said system also comprises an integrator for the location-dependent determination of the interference pattern which is superimposed on the radiation detector at various frequencies. The invention also relates to a method for recording an interferogram, a method for providing an object with a specified surface and a method for manufacturing the same.
IPC 1-7
IPC 8 full level
G01B 9/02 (2006.01); G01B 11/24 (2006.01); G01B 11/30 (2006.01)
CPC (source: EP US)
G01B 9/02004 (2013.01 - EP US); G01B 9/02039 (2013.01 - EP US); G01B 9/02057 (2013.01 - EP US); G01B 9/02059 (2013.01 - EP US); G01B 9/02069 (2013.01 - EP US); G01B 9/02072 (2013.06 - EP US); G01B 11/2441 (2013.01 - EP US); G01B 11/306 (2013.01 - EP US)
Citation (search report)
See references of WO 03002933A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 03002933 A1 20030109; DE 10130902 A1 20030116; EP 1402228 A1 20040331; JP 2004530905 A 20041007; US 2004190002 A1 20040930; US 7002694 B2 20060221
DOCDB simple family (application)
EP 0207080 W 20020626; DE 10130902 A 20010627; EP 02735425 A 20020626; JP 2003508872 A 20020626; US 74379203 A 20031224