EP 1425783 A1 20040609 - HOMOGENIZATION OF A SPATIALLY COHERENT RADIATION BEAM AND PRINTING AND INSPECTION, RESPECTIVELY, OF A PATTERN ON A WORKPIECE
Title (en)
HOMOGENIZATION OF A SPATIALLY COHERENT RADIATION BEAM AND PRINTING AND INSPECTION, RESPECTIVELY, OF A PATTERN ON A WORKPIECE
Title (de)
HOMOGENISIERUNG EINES RÄUMLICH KOHÄRENTEN STRAHLUNGSSTRAHLS UND DRUCKEN BZW. UNTERSUCHUNG EINER STRUKTUR AUF EINEM ARBEITSSTÜCK
Title (fr)
UNIFORMISATION D'UN FAISCEAU DE RAYONNEMENT SPATIALEMENT COHERENT ET RESPECTIVEMENT IMPRESSION ET CONTROLE D'UN MOTIF SUR LA PIECE
Publication
Application
Priority
- SE 0201607 W 20020909
- SE 0103006 A 20010910
Abstract (en)
[origin: WO03023833A1] The present invention relates to a device for homogenizing the spatial intensity distribution of a spatially coherent radiation beam (11). The device includes a grating (13) arranged in the propagation path of said spatially coherent radiation beam for diffracting said coherent beam and thus decreasing the coherence length of a diffracted radiation beam in a direction orthogonal to the propagation direction of the radiation beam relative to the width of the radiation beam in said orthogonal direction; and a radiation splitting and directing arrangement (15, 17, 19) arranged in the propagation path of said diffracted radiation beam for splitting said diffracted radiation beam into spatially separated portions and for superimposing said spatially separated portions to thereby form a radiation beam having a homogenized spatial intensity distribution.
IPC 1-7
IPC 8 full level
G01N 21/84 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP)
G02B 3/0062 (2013.01); G02B 5/1814 (2013.01); G02B 27/0961 (2013.01); G02B 27/48 (2013.01); G03F 7/70025 (2013.01); G03F 7/70583 (2013.01)
Citation (search report)
See references of WO 03023833A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
DOCDB simple family (publication)
WO 03023833 A1 20030320; EP 1425783 A1 20040609; JP 2005503018 A 20050127; SE 0103006 D0 20010910
DOCDB simple family (application)
SE 0201607 W 20020909; EP 02768252 A 20020909; JP 2003527781 A 20020909; SE 0103006 A 20010910