EP 1470523 A1 20041027 - METHOD AND DEVICE FOR IDENTIFICATION OF CHARACTERS WRITTEN ON A SEMICONDUCTOR SHEET COMPRISING AT LEAST ONE ALIGNMENT MARKER
Title (en)
METHOD AND DEVICE FOR IDENTIFICATION OF CHARACTERS WRITTEN ON A SEMICONDUCTOR SHEET COMPRISING AT LEAST ONE ALIGNMENT MARKER
Title (de)
VERFAHREN UND VORRICHTUNG ZUR IDENTIFIZIERUNG VON MUSTERN AUF EINER MIT EINER STEUERMARKIERUNG VERSEHENEN HALBLEITERSCHEIBE
Title (fr)
PROCEDE ET DISPOSITIF D'IDENTIFICATION DE CARACTERES INSCRITES SUR UNE PLAQUE DE SEMI-CONDUCTEUR COMPORTANTAU MOINS UNE MARQUE D'ORIENTATION
Publication
Application
Priority
- FR 0300255 W 20030128
- FR 0201032 A 20020129
Abstract (en)
[origin: FR2835337A1] The invention relates to a method and device for identification of characters written on a semiconductor sheet comprising at least one alignment marker with the following method steps: - gripping the semiconductor sheet between three rotating stops (6, 7, 8) connected to a prehensile arm (5), by means of applying pressure to the periphery thereof, orientation of the gripped sheet by means of rotation of one (8) of the three stops such as to place the marker in a given position, placing means for reflecting (13) specific illuminating beams in a region close to and above the characters for identification, illumination of the characters for identification by means of a specific illuminating beam which is reflected by the means for reflection (13) onto the characters, observation of the characters using the illuminating beams reflected as above and identification of the characters. The invention further relates to a device for identification of characters written on a semiconductor sheet, comprising an alignment marker for carrying out said method.
IPC 1-7
IPC 8 full level
CPC (source: EP KR US)
G06K 7/10861 (2013.01 - EP US); H01L 21/68 (2013.01 - KR); Y10S 414/136 (2013.01 - EP US); Y10S 414/141 (2013.01 - EP US)
Citation (search report)
See references of WO 03065287A1
DOCDB simple family (publication)
FR 2835337 A1 20030801; FR 2835337 B1 20040820; CA 2474543 A1 20030807; CN 100347716 C 20071107; CN 1623161 A 20050601; EP 1470523 A1 20041027; JP 2005516311 A 20050602; KR 20040086304 A 20041008; US 2003219914 A1 20031127; US 6961639 B2 20051101; WO 03065287 A1 20030807
DOCDB simple family (application)
FR 0201032 A 20020129; CA 2474543 A 20030128; CN 03802813 A 20030128; EP 03715054 A 20030128; FR 0300255 W 20030128; JP 2003564804 A 20030128; KR 20047011607 A 20030128; US 35384503 A 20030128