EP 1476716 A1 20041117 - LOW-COHERENCE INFEROMETRIC DEVICE FOR LIGHT-OPTICAL SCANNING OF AN OBJECT
Title (en)
LOW-COHERENCE INFEROMETRIC DEVICE FOR LIGHT-OPTICAL SCANNING OF AN OBJECT
Title (de)
NIEDERKOHÄRENZ-INTERFEROMETRISCHES GERÄT ZUR LICHTOPTISCHEN ABTASTUNG EINES OBJEKTES
Title (fr)
APPAREIL INTERFEROMETRIQUE A BASSE COHERENCE DESTINE AU BALAYAGE OPTIQUE D'UN OBJET
Publication
Application
Priority
- DE 0300288 W 20030201
- DE 10207186 A 20020221
Abstract (en)
[origin: DE10207186C1] Interferometry device has a short coherence interferometer (6) with a short coherence light source (7), a reference reflector (21) and a detector (25), receiving an interference signal obtained by combining a measuring light beam (16) and a reference light beam (22). A variable wavelength selection device (30) is inserted in the light path between the beam combining device (10) and the detector for selection of the detection light beam (24) in dependence on its wavelength, with variation of the selected wavelength numbers dependent on the scanning position.
IPC 1-7
IPC 8 full level
G01B 9/02 (2006.01); G01B 11/24 (2006.01); G01N 21/47 (2006.01)
CPC (source: EP US)
G01B 9/0209 (2013.01 - EP US); G01B 11/24 (2013.01 - EP US); G01N 21/4795 (2013.01 - EP US); G01B 2290/20 (2013.01 - EP US); G01B 2290/35 (2013.01 - EP US); G01B 2290/40 (2013.01 - EP US)
Citation (search report)
See references of WO 03073041A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR
DOCDB simple family (publication)
DE 10207186 C1 20030417; AU 2003215503 A1 20030909; AU 2003215503 B2 20070830; CA 2476174 A1 20030904; CA 2476174 C 20100420; DE 10390785 D2 20050105; EP 1476716 A1 20041117; JP 2005518535 A 20050623; JP 4286667 B2 20090701; US 2005190371 A1 20050901; US 7170610 B2 20070130; WO 03073041 A1 20030904
DOCDB simple family (application)
DE 10207186 A 20020221; AU 2003215503 A 20030201; CA 2476174 A 20030201; DE 0300288 W 20030201; DE 10390785 T 20030201; EP 03742908 A 20030201; JP 2003571683 A 20030201; US 50439704 A 20040811