EP 1636629 A4 20090415 - FABRICATION OF A HIGH FILL RATIO REFLECTIVE SPATIAL LIGHT MODULATOR WITH HIDDEN HINGE

Title (en)

FABRICATION OF A HIGH FILL RATIO REFLECTIVE SPATIAL LIGHT MODULATOR WITH HIDDEN HINGE

Title (de)

HERSTELLUNG EINES REFLEKTIVEN RAUM-LICHTMODULATORS MIT HOHEM FÜLLVERHÄLTNIS MIT VERBORGENEM SCHWENKGLIED

Title (fr)

FABRICATION D'UN MODULATEUR SPATIAL DE LUMIERE REFLECTEUR A CHARNIERE INCORPOREE ET A FACTEUR DE REMPLISSAGE ELEVE

Publication

EP 1636629 A4 20090415 (EN)

Application

EP 04710687 A 20040212

Priority

US 2004004357 W 20040212
US 47540403 P 20030602
US 61096703 A 20030630

Abstract (en)

[origin: WO2004109364A1] Fabrication of a micro mirror array having a hidden hinge that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array is fabricated from a substrate that is a first substrate of a single crystal material. Cavities are formed in a first side of the first substrate. Separately, electrodes and addressing and control circuitry are fabricated on a first side of a second substrate. The first side of the first substrate is bonded to the first side of the second substrate. The sides are aligned so the electrodes on the second substrate are in proper relation with the mirror plates that will be formed on the first substrate and that the electrodes will control. The first substrate is thinned to a predetermined, desired thickness, a hinge is etched, a sacrificial material is deposited, the upper surface of the first substrate is planarized, a reflective surface is deposited to cover the hinge, a mirror is released by etching and the sacrificial layer around the hinge is removed to release the hinge so the hinge can rotate about an axis in line with the hinge.

IPC 8 full level

G02B 26/00 (2006.01); G02B 26/08 (2006.01); G02F 1/00 (2006.01)

CPC (source: EP KR)

B81B 3/004 (2013.01 - EP KR); G02B 26/0841 (2013.01 - EP KR); B81B 2201/042 (2013.01 - EP KR); Y10S 359/904 (2013.01 - KR)

Citation (search report)

[A] EP 1180848 A1 20020220 - ST MICROELECTRONICS SRL [IT]
[A] US 2002149294 A1 20021017 - MATSUMOTO KAZUYA [JP], et al
[A] US 6204085 B1 20010320 - STRUMPELL MARK H [US], et al
[A] DE 19757197 A1 19990624 - BOSCH GMBH ROBERT [DE]
[A] US 2002013054 A1 20020131 - FARMER II KENNETH R [US], et al
See references of WO 2004109364A1

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR

DOCDB simple family (publication)

WO 2004109364 A1 20041216; EP 1636629 A1 20060322; EP 1636629 A4 20090415; JP 2006526806 A 20061124; KR 20060016800 A 20060222; TW 200525272 A 20050801; TW I356912 B 20120121

DOCDB simple family (application)

US 2004004357 W 20040212; EP 04710687 A 20040212; JP 2006508742 A 20040212; KR 20057023191 A 20051202; TW 93115847 A 20040602