EP 1687461 A2 20060809 - THE FORMATION OF LAYERS ON SUBSTRATES
Title (en)
THE FORMATION OF LAYERS ON SUBSTRATES
Title (de)
BILDUNG VON SCHICHTEN AUF EINEM SUBSTRAT
Title (fr)
FORMATION DE COUCHES SUR DES SUBSTRATS
Publication
Application
Priority
- GB 2004004589 W 20041029
- GB 0325247 A 20031029
- GB 0328221 A 20031205
- US 52794803 P 20031208
- GB 0401826 A 20040128
Abstract (en)
[origin: WO2005045095A2] Disclosed is a method of forming, on the surface of a substrate, a first layer which is suitable for activating a second solid-layer-forming chemical reaction thereon, the method comprising the steps of bringing into contact with the substrate a first liquid which forms a first solid layer thereon, the first liquid comprising an activator for the second solid-layer-forming chemical reaction, characterised in that the first liquid is selected so that the first solid layer adheres to the substrate and is permeable to a second liquid that comprises one or more reagents for the second solid-layer-forming chemical reaction. A second solid layer can then be formed on the substrate by bringing into contact with the first solid layer a second liquid comprising one or more reagents for the second solid-layer-forming reaction.
IPC 8 full level
C23C 18/16 (2006.01); C23C 18/30 (2006.01); C23C 18/40 (2006.01)
CPC (source: EP KR)
C23C 18/16 (2013.01 - KR); C23C 18/1605 (2013.01 - EP); C23C 18/1608 (2013.01 - EP); C23C 18/1865 (2013.01 - EP); C23C 18/1879 (2013.01 - EP); C23C 18/1889 (2013.01 - EP); C23C 18/20 (2013.01 - KR); C23C 18/208 (2013.01 - EP); C23C 18/2086 (2013.01 - EP); C23C 18/30 (2013.01 - EP KR); C23C 18/40 (2013.01 - EP); C23C 18/1667 (2013.01 - EP); C23C 18/1678 (2013.01 - EP); H01L 2924/3025 (2013.01 - EP)
Citation (search report)
See references of WO 2005045095A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2005045095 A2 20050519; WO 2005045095 A3 20051020; EP 1687461 A2 20060809; JP 2007510063 A 20070419; KR 20060123213 A 20061201
DOCDB simple family (application)
GB 2004004589 W 20041029; EP 04791626 A 20041029; JP 2006537430 A 20041029; KR 20067010522 A 20060529