EP 1697798 A2 20060906 - PROJECTION OBJECTIVE HAVING A HIGH APERTURE AND A PLANAR END SURFACE
Title (en)
PROJECTION OBJECTIVE HAVING A HIGH APERTURE AND A PLANAR END SURFACE
Title (de)
PROJEKTIONSOBJEKTIV MIT EINER HOHEN APERTUR UND EINER PLANARENDOBERFLÄCHE
Title (fr)
OBJECTIF DE PROJECTION A GRANDE OUVERTURE ET SURFACE D'EXTREMITE PLANE
Publication
Application
Priority
- EP 2004014062 W 20041210
- US 73462303 A 20031215
- US 53062303 P 20031219
- US 53097803 P 20031222
- US 53624804 P 20040114
- US 54496704 P 20040213
- US 56800604 P 20040504
- US 58750404 P 20040714
- US 59177504 P 20040727
- US 59220804 P 20040729
- US 61282304 P 20040924
- US 61767404 P 20041013
- DE 102004051730 A 20041022
Abstract (en)
[origin: WO2005059617A2] A projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective suitable for microlithography projection exposure machines has a plurality of optical elements transparent for radiation at an operating wavelength of the projection objective. At least one optical element is a high-index optical element made from a high-index material with a refractive index n >= 1.6 at the operating wavelength.
IPC 8 full level
G03F 7/20 (2006.01); G02B 17/00 (2006.01)
CPC (source: EP KR)
G01B 13/00 (2013.01 - KR); G01B 17/00 (2013.01 - KR); G02B 13/18 (2013.01 - KR); G02B 17/0828 (2013.01 - EP); G02B 17/0892 (2013.01 - EP); G03F 7/20 (2013.01 - KR); G03F 7/70225 (2013.01 - EP); G03F 7/70341 (2013.01 - EP); G03F 7/7035 (2013.01 - EP); G03F 7/70958 (2013.01 - EP); G03F 7/70966 (2013.01 - EP)
Citation (search report)
See references of WO 2005059617A2
Designated contracting state (EPC)
DE NL
DOCDB simple family (publication)
WO 2005059617 A2 20050630; WO 2005059617 A3 20060209; EP 1697798 A2 20060906; JP 2007514192 A 20070531; JP 5106858 B2 20121226; KR 101200654 B1 20121112; KR 20060109935 A 20061023
DOCDB simple family (application)
EP 2004014062 W 20041210; EP 04803712 A 20041210; JP 2006543484 A 20041210; KR 20067011811 A 20041210