EP 1725343 A2 20061129 - ASYMMETRIC MEMBRANE CMUT DEVICES AND FABRICATION METHODS
Title (en)
ASYMMETRIC MEMBRANE CMUT DEVICES AND FABRICATION METHODS
Title (de)
CMUT-BAUELEMENTE MIT ASYMMETRISCHER MEMBRAN UND HERSTELLUNGSVERFAHREN
Title (fr)
DISPOSITIFS CMUT A MEMBRANE ASYMETRIQUE ET LEURS METHODES DE FABRICATION
Publication
Application
Priority
- US 2005008259 W 20050311
- US 55208204 P 20040311
- US 2005003898 W 20050207
- US 5367205 A 20050207
- US 2005006474 W 20050228
- US 6800505 A 20050228
- US 6812905 A 20050228
- US 2005006408 W 20050228
Abstract (en)
[origin: WO2005087391A2] Asymmetric membrane capacitive micromachined ultrasonic transducer ("cMUT") devices and fabrication methods are provided. In a preferred embodiment, a cMUT device according to the present invention generally comprises a membrane having asymmetric properties. The membrane can have a varied width across its length so that its ends have different widths. The asymmetric membrane can have varied flex characteristics due to its varied width dimensions. In another preferred embodiment, a cMUT device according to the present invention generally comprises an electrode element having asymmetric properties. The electrode element can have a varied width across its length so that its ends have different widths. The asymmetric electrode element can have different reception and transmission characteristics due to its varied width dimensions. In another preferred embodiment, a mass load positioned along the membrane can alter the mass distribution of the membrane. Other embodiments are also claimed and described.
IPC 8 full level
B06B 1/02 (2006.01)
CPC (source: EP)
B06B 1/0292 (2013.01); G01N 29/2406 (2013.01)
Citation (search report)
See references of WO 2005087391A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR LV MK YU
DOCDB simple family (publication)
WO 2005087391 A2 20050922; WO 2005087391 A3 20060427; EP 1725343 A2 20061129
DOCDB simple family (application)
US 2005008259 W 20050311; EP 05725443 A 20050311