EP 1760760 A3 20080709 - x-ray or XUV generation unit
Title (en)
x-ray or XUV generation unit
Title (de)
Vorrichtung zur Erzeugung von Röntgen- oder XUV-Strahlung
Title (fr)
Source de rayons X ou de XUV
Publication
Application
Priority
DE 102005041923 A 20050903
Abstract (en)
[origin: EP1760760A2] A particle source (10) directs a particle jet (12) of electrically charged particles towards a target (16). A deflecting system (26) diverts the central axis of the particle jet to a deflection point (20). Another deflecting system (32) diverts the central axis of the particle jet to another deflection point (22). The deflecting systems are arranged such that the deflection points are provided before the point of impact (24) on the target.
IPC 8 full level
H01J 35/14 (2006.01)
CPC (source: EP KR US)
G21K 1/08 (2013.01 - KR); G21K 1/087 (2013.01 - KR); H01J 35/02 (2013.01 - EP US); H01J 35/147 (2019.04 - EP US); H01J 35/153 (2019.04 - EP US); H01J 35/30 (2013.01 - EP US)
Citation (search report)
- [XY] EP 1557864 A1 20050727 - TOHKEN CO LTD [JP]
- [XY] JP 2003344596 A 20031203 - SHIMADZU CORP
- [XY] JP 2004014402 A 20040115 - SHIMADZU CORP
- [XY] US 2001001010 A1 20010510 - WILKINS STEPHEN WILLIAM [AU]
- [A] WO 03032359 A2 20030417 - APPLIED MATERIALS ISREAL LTD [IL], et al
- [Y] JP 2001319608 A 20011116 - SHIMADZU CORP
- [Y] JP H0218844 A 19900123 - JEOL LTD
- [A] DE 1063286 B 19590813 - FOERDERUNG FORSCHUNG GMBH
- [A] DE 2364142 A1 19740704 - JEOL LTD
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR MK RS
DOCDB simple family (publication)
EP 1760760 A2 20070307; EP 1760760 A3 20080709; AU 2006203782 A1 20070322; CA 2558216 A1 20070303; CN 1959924 A 20070509; DE 102005041923 A1 20070308; IL 177803 A0 20061231; JP 2007073517 A 20070322; KR 20070026024 A 20070308; RU 2006131616 A 20080310; TW 200715337 A 20070416; US 2007051907 A1 20070308
DOCDB simple family (application)
EP 06016388 A 20060805; AU 2006203782 A 20060830; CA 2558216 A 20060830; CN 200610129176 A 20060904; DE 102005041923 A 20050903; IL 17780306 A 20060831; JP 2006239476 A 20060904; KR 20060079227 A 20060822; RU 2006131616 A 20060901; TW 95132577 A 20060904; US 51538206 A 20060905