EP 1805538 A1 20070711 - DBR LASER ELEMENT WITH HIGH ORDER BRAGG GRATING AND RIB WAVEGUIDE
Title (en)
DBR LASER ELEMENT WITH HIGH ORDER BRAGG GRATING AND RIB WAVEGUIDE
Title (de)
DBR LASERELEMENT MIT BRAGG-GITTER HOHER ORDNUNG UND RIPPENWELLENLEITER
Title (fr)
ELEMENT OPTIQUE ET SON PROCEDE DE PRODUCTION
Publication
Application
Priority
- EP 2005011656 W 20051026
- DE 102004052857 A 20041026
Abstract (en)
[origin: WO2006045632A1] An optical element is disclosed having a planar vertical waveguide structure (1) on the surface of which are arranged a Bragg grating (5) and a rib waveguide (6), as well as a process for producing the same. The object of the present invention is to provide an optical element having a Bragg grating (5) and a rib waveguide (6) which can be produced faster and more economically than in the prior art, while continuing to satisfy predetermined optical requirements. For that purpose, a photoresist layer structure (3) which substantially corresponds to the structure of the Bragg grating (5) and rib waveguide (6) is formed on the substantially planar and even vertical waveguide structure (1), the photoresist layer structure (3) extending linearly in the region of the Bragg grating (5) with a width which corresponds to at least 70 % of the distance between two adjacent lines. The planar vertical waveguide structure (1) with the overlying photoresist layer structure (3) is then etched and the photoresist layer structure (3) is removed from the planar vertical waveguide structure (1).
IPC 8 full level
G02B 6/124 (2006.01); G02B 6/136 (2006.01); H01S 5/125 (2006.01)
CPC (source: EP)
G02B 6/124 (2013.01); G02B 6/136 (2013.01); H01S 5/125 (2013.01); H01S 5/1203 (2013.01); H01S 5/22 (2013.01)
Citation (search report)
See references of WO 2006045632A1
Citation (examination)
KIM ET AL.: "1.5 micrometer Wavelength Distributed Feedback Lasers with Deeply Etched First-Order Vertical Grating", JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 40, 15 October 2001 (2001-10-15), pages L1107 - L1109
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2006045632 A1 20060504; DE 102004052857 A1 20060601; DE 102004052857 B4 20060907; EP 1805538 A1 20070711
DOCDB simple family (application)
EP 2005011656 W 20051026; DE 102004052857 A 20041026; EP 05811064 A 20051026