EP 1931941 A1 20080618 - INTERFEROMETRIC DETERMINATION OF A LAYER THICKNESS
Title (en)
INTERFEROMETRIC DETERMINATION OF A LAYER THICKNESS
Title (de)
INTERFEROMETRISCHE SCHICHTDICKENBESTIMMUNG
Title (fr)
DETERMINATION INTERFEROMETRIQUE D'EPAISSEUR DE COUCHE
Publication
Application
Priority
- EP 2006064954 W 20060802
- DE 102005045512 A 20050922
- DE 102006016132 A 20060406
Abstract (en)
[origin: WO2007033851A1] The invention relates to an interferometric measuring apparatus for measuring thicknesses of partially transparent layers on substrates, especially carbon-based wear-resistant layers. Said measuring apparatus comprises a scanning device which automatically scans the layers in the vertical direction (Z) thereof and by means of which an interference plane (IE) can be moved relative to the layer structure, and an interferometer part (IT) that is provided with a white light interferometer (WLI) and/or a wavelength scanning interferometer (WLSI). The invention further relates to a corresponding evaluation method.
IPC 8 full level
G01B 11/06 (2006.01); G01B 9/02 (2006.01)
CPC (source: EP US)
G01B 11/0675 (2013.01 - EP US)
Citation (search report)
See references of WO 2007033851A1
Citation (examination)
US 2005088663 A1 20050428 - DE GROOT PETER J [US], et al
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 2007033851 A1 20070329; EP 1931941 A1 20080618; JP 2009509149 A 20090305; US 2009296099 A1 20091203
DOCDB simple family (application)
EP 2006064954 W 20060802; EP 06764297 A 20060802; JP 2008531633 A 20060802; US 99240206 A 20060802