EP 2024986 A1 20090218 - RADIOFREQUENCY OR HYPERFREQUENCY MICRO SWITCH STRUCTURE AND METHOD FOR PRODUCING ONE SUCH STRUCTURE
Title (en)
RADIOFREQUENCY OR HYPERFREQUENCY MICRO SWITCH STRUCTURE AND METHOD FOR PRODUCING ONE SUCH STRUCTURE
Title (de)
HOCHFREQUENZ- ODER HYPERFREQUENZ-MIKROSCHALTERSTRUKTUR UND VERFAHREN ZUR HERSTELLUNG EINER SOLCHEN STRUKTUR
Title (fr)
STRUCTURE DE MICRO-COMMUTATEURS RADIOFREQUENCE OU HYPERFREQUENCE ET PROCEDE DE FABRICATION D'UNE TELLE STRUCTURE
Publication
Application
Priority
- EP 2007055358 W 20070531
- FR 0604858 A 20060531
Abstract (en)
[origin: WO2007138102A1] The invention relates to a micro switch structure comprising: a substrate (1) covered by a passivation layer (2), a first signal line LS-IN and a second signal line LS-OUT being each located in the extension of the other and separated by a switching region (10); a control electrode (3) arranged in said region, a frequency-invariant dielectric material (4) with high relative permittivity being arranged on the control electrode such that the control electrode is wider on both sides and in the orthogonal direction, between the two signal lines, and the dielectric overlaps on both sides of the control electrode and lies on the passivation layer; and parallel mass lines arranged symmetrically either side of the signal lines and on a topological level separated from that of the signal lines by at least one insulating layer in a material different from that of the passivation layer.
IPC 8 full level
H01H 59/00 (2006.01); H01P 1/12 (2006.01)
CPC (source: EP US)
H01H 59/0009 (2013.01 - EP US); H01P 1/127 (2013.01 - EP US)
Citation (search report)
See references of WO 2007138102A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR MK RS
DOCDB simple family (publication)
FR 2901781 A1 20071207; FR 2901781 B1 20080704; EP 2024986 A1 20090218; EP 2024986 B1 20120627; US 2009236211 A1 20090924; US 7960662 B2 20110614; WO 2007138102 A1 20071206
DOCDB simple family (application)
FR 0604858 A 20060531; EP 07729759 A 20070531; EP 2007055358 W 20070531; US 30252507 A 20070531