EP 2063981 A1 20090603 - MICROSCREEN FOR FILTERING PARTICLES IN MICROFLUIDICS APPLICATIONS AND PRODUCTION THEREOF
Title (en)
MICROSCREEN FOR FILTERING PARTICLES IN MICROFLUIDICS APPLICATIONS AND PRODUCTION THEREOF
Title (de)
MIKROSIEB ZUR FILTERUNG VON PARTIKELN IN MIKROFLUIDIK-ANWENDUNGEN UND DESSEN HERSTELLUNG
Title (fr)
MICROTAMIS POUR LA FILTRATION DE PARTICULES DANS DES APPLICATIONS MICROFLUIDES, ET SA FABRICATION
Publication
Application
Priority
- EP 2007057275 W 20070713
- DE 102006041396 A 20060904
Abstract (en)
[origin: WO2008028717A1] A microscreen (1) is proposed for filtering particles in microfluidics applications, and a production process thereof. The microscreen (1) comprises an Si substrate (3) which has been p-doped at least in some regions and has a cutout, a macroporous membrane (15) connected to the Si substrate (3) via n-doped regions (5a, 5b), wherein the cutout of the Si substrate (3) is arranged directly below the membrane (15) to form a cavity (20).
IPC 8 full level
B01D 67/00 (2006.01); B01D 69/10 (2006.01); B01D 69/12 (2006.01)
CPC (source: EP US)
B01D 61/18 (2013.01 - EP US); B01D 63/081 (2013.01 - EP US); B01D 63/088 (2013.01 - EP US); B01D 67/0062 (2013.01 - EP US); B01D 69/02 (2013.01 - EP US); B01D 2313/10 (2013.01 - EP US); B01J 2219/00783 (2013.01 - EP US); B01J 2219/00828 (2013.01 - EP US); B01J 2219/00835 (2013.01 - EP US); B01J 2219/00837 (2013.01 - EP US); B01J 2219/00844 (2013.01 - EP US); B01J 2219/00907 (2013.01 - EP US); B01J 2219/00909 (2013.01 - EP US); B01L 3/502753 (2013.01 - EP US)
Citation (search report)
See references of WO 2008028717A1
Citation (examination)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR MK RS
DOCDB simple family (publication)
DE 102006041396 A1 20080306; EP 2063981 A1 20090603; US 2010296986 A1 20101125; WO 2008028717 A1 20080313
DOCDB simple family (application)
DE 102006041396 A 20060904; EP 07787543 A 20070713; EP 2007057275 W 20070713; US 30830307 A 20070713