Global Patent Index - EP 2170764 A4

EP 2170764 A4 20110622 - METHODS OF MAKING HIERARCHICAL ARTICLES

Title (en)

METHODS OF MAKING HIERARCHICAL ARTICLES

Title (de)

VERFAHREN ZUR HERSTELLUNG VON HIERARCHISCHEN ARTIKELN

Title (fr)

PROCÉDÉS DE FABRICATION D'ARTICLES HIÉRARCHIQUES

Publication

EP 2170764 A4 20110622 (EN)

Application

EP 08769665 A 20080523

Priority

  • US 2008064631 W 20080523
  • US 99975207 P 20070621
  • US 99975307 P 20070621

Abstract (en)

[origin: WO2009002644A2] Provided is a method of fabricating hierarchical articles that contain nano features and microstructures. The method includes providing a substrate that includes nano features and then creating microstructures adding a layer, removing at least a portion of the layer to reveal at least a portion of the substrate. Also provided is a method of making hierarchical structures that contain nanofeatures and microstructures wherein the method includes adding the nanofeatures to existing microstuctures using nanoparticles as an etch mask.

IPC 8 full level

B82B 3/00 (2006.01); G03F 7/26 (2006.01); H01L 21/02 (2006.01)

CPC (source: EP)

B81C 99/009 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); G03F 7/0002 (2013.01); B81B 2203/0361 (2013.01)

Citation (search report)

  • [XYI] US 2005245094 A1 20051103 - BRODSKY COLIN J [US], et al
  • [XI] RABAROT M ET AL: "THICK SU-8 PHOTOLITHOGRAPHY FOR BIOMEMS", PROCEEDINGS OF SPIE, SPIE, USA, vol. 4979, 27 January 2003 (2003-01-27), pages 382 - 393, XP009026373, ISSN: 0277-786X, DOI: 10.1117/12.478244
  • [Y] TORMEN MASSIMO ET AL: "Fabrication of three-dimensional stamps for embossing techniques by lithographically controlled isotropic wet etching", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B, AVS / AIP, MELVILLE, NEW YORK, NY, US, vol. 23, no. 6, 2 December 2005 (2005-12-02), pages 2920 - 2924, XP012080280, ISSN: 1071-1023, DOI: 10.1116/1.2130348
  • See references of WO 2009002644A2

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

DOCDB simple family (publication)

WO 2009002644 A2 20081231; WO 2009002644 A3 20090219; WO 2009002644 A8 20111222; CN 101827783 A 20100908; EP 2170764 A2 20100407; EP 2170764 A4 20110622

DOCDB simple family (application)

US 2008064631 W 20080523; CN 200880103985 A 20080523; EP 08769665 A 20080523