EP 2257822 A1 20101208 - MICROELECTROMECHANICAL INERTIAL SENSOR WITH ATMOSPHERIC DAMPING
Title (en)
MICROELECTROMECHANICAL INERTIAL SENSOR WITH ATMOSPHERIC DAMPING
Title (de)
MIKROELEKTROMECHANISCHER INERTIALSENSOR MIT ATMOSPHAERISCHER BEDAEMPFUNG
Title (fr)
CAPTEUR INERTIEL MICROÉLECTROMÉCANIQUE AVEC AMORTISSEMENT ATMOSPHÉRIQUE
Publication
Application
Priority
- EP 2009053541 W 20090325
- DE 102008016004 A 20080327
Abstract (en)
[origin: WO2009118355A1] The present invention relates to an inertial sensor, preferably an acceleration sensor or multi-axis acceleration sensor as a microelectromechanical construction element, said sensor comprising a housing with at least one first gas-filled cavity in which a first detection unit is disposed moveably relative to the housing for detection of an acceleration to be detected, wherein the inertial sensor comprises a damping structure.
IPC 8 full level
G01P 15/08 (2006.01); G01C 19/5783 (2012.01)
CPC (source: EP US)
G01C 19/5783 (2013.01 - EP US); G01P 1/003 (2013.01 - EP US); G01P 15/0802 (2013.01 - EP US); G01P 15/125 (2013.01 - EP US); G01P 2015/0814 (2013.01 - EP US); Y10T 29/52 (2015.01 - US)
Citation (search report)
See references of WO 2009118355A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA RS
DOCDB simple family (publication)
WO 2009118355 A1 20091001; DE 102008016004 A1 20091008; EP 2257822 A1 20101208; TW 200946915 A 20091116; US 2011016972 A1 20110127; US 8590376 B2 20131126
DOCDB simple family (application)
EP 2009053541 W 20090325; DE 102008016004 A 20080327; EP 09723766 A 20090325; TW 98109698 A 20090325; US 93478309 A 20090325