EP 2425468 A4 20140521 - MONOLITHIC FBAR-CMOS STRUCTURE SUCH AS FOR MASS SENSING
Title (en)
MONOLITHIC FBAR-CMOS STRUCTURE SUCH AS FOR MASS SENSING
Title (de)
MONOLITHISCHE FBAR-CMOS-STRUKTUR, Z. B. FÜR MASSENERFASSUNGEN
Title (fr)
STRUCTURE FBAR-CMOS MONOLITHIQUE TELLE QUE POUR UNE DÉTECTION DE MASSE
Publication
Application
Priority
- US 2010032976 W 20100429
- US 17386609 P 20090429
- US 21561109 P 20090507
Abstract (en)
[origin: WO2010127122A1] An apparatus comprises a thin-film bulk acoustic resonator such as including an acoustic mirror, a piezoelectric region acoustically coupled to the acoustic mirror, and first and second conductors electrically coupled to the piezoelectric region. In an example, an integrated circuit substrate can include an interface circuit connected to the first and second conductors of the resonator, the integrated circuit substrate configured to mechanically support the resonator. An example can include an array of such resonators co-integrated with the interface circuit and configured to detect a mass change associated with one or more of a specified protein binding, a specified antibody-antigen coupling, a specified hybridization of a DNA oligomer, or an adsorption of specified gas molecules.
IPC 8 full level
H10N 80/00 (2023.01)
CPC (source: EP)
G01N 29/022 (2013.01); G01N 29/036 (2013.01); G01N 29/2437 (2013.01); H03H 9/0557 (2013.01); G01N 2291/0256 (2013.01); G01N 2291/0426 (2013.01); H03H 9/175 (2013.01)
Citation (search report)
- [X] US 2006125489 A1 20060615 - FEUCHT HANS-DIETER [DE], et al
- [X] US 2006202779 A1 20060914 - FAZZIO R S [US], et al
- [X] US 2003199105 A1 20031023 - KUB FRANCIS J [US], et al
- [X] BREDERLOW R ET AL: "Biochemical sensors based on bulk acoustic wave resonators", INTERNATIONAL ELECTRON DEVICES MEETING 2003. IEDM. TECHNICAL DIGEST. WASHINGTON, DC, DEC 8 - 10, 2003; [INTERNATIONAL ELECTRON DEVICES MEETING], NEW YORK, NY : IEEE, US, 8 December 2003 (2003-12-08), pages 992 - 994, XP010684243, ISBN: 978-0-7803-7872-8
- See also references of WO 2010127122A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
WO 2010127122 A1 20101104; CA 2760508 A1 20101104; CN 102414855 A 20120411; CN 102414855 B 20150211; EP 2425468 A1 20120307; EP 2425468 A4 20140521
DOCDB simple family (application)
US 2010032976 W 20100429; CA 2760508 A 20100429; CN 201080018971 A 20100429; EP 10770334 A 20100429