EP 2483918 A1 20120808 - SAMPLE RECEIVING DEVICE FOR SAMPLE MATERIALS IN ULTRA-HIGH VACUUM CHAMBERS
Title (en)
SAMPLE RECEIVING DEVICE FOR SAMPLE MATERIALS IN ULTRA-HIGH VACUUM CHAMBERS
Title (de)
PROBENAUFNAHMEVORRICHTUNG FÜR PROBENMATERIALIEN IN ULTRAHOCHVAKUUMKAMMERN
Title (fr)
DISPOSITIF DE PRÉLÈVEMENT D'ÉCHANTILLON POUR DES MATÉRIAUX D'ÉCHANTILLON DANS DES CHAMBRES À VIDE TRÈS POUSSÉ
Publication
Application
Priority
- DE 102009048170 A 20091002
- EP 2010006052 W 20101004
Abstract (en)
[origin: WO2011038938A1] The invention relates to a sample receiving device for sample materials in ultra-high vacuum chambers, comprising an exchangeable sample holder (4), which has a disk-shaped sample support body and an extension projecting therefrom, a mounting part (1) with a centering opening, which is designed for receiving the extension of the sample holder (4) in a centered manner and transitions into a through-passage (8) extending through the mounting part, a tie bar (3), which is introduced in the though-passage (8) from the side opposite of the centering opening and which, with the inserted end, moveably holds at least two tensioning bodies (3b) such that they can perform a movement transversely to the longitudinal axis of the through-passage (8), a guide curve (7) that is stationary relative to the mounting part (1) in order to guide the tensioning bodies (3b) during movement of the tie bar in the direction of the longitudinal axis of the through-passage (8) such that the tensioning bodies (3b) in a first position of the tie bar (3) are pressed against the extension (4a) in engagement behind radial engagement protrusions such that the tie bar (3) can exert a tensile force directed into the centering opening on the sample holder (4), and the tensioning bodies (3b) in a second position of the tie bar (3), in which said tie bar is pushed further into the through-passage, are displaced in the direction transversely to the longitudinal axis of the through-passage so far that the radial engagement protrusions can pass them when the extension of the sample holder (4) is pulled out of the through-passage and the centering opening.
IPC 8 full level
H01L 21/687 (2006.01)
CPC (source: EP US)
H01L 21/68792 (2013.01 - EP US); H01J 37/3411 (2013.01 - US); Y10T 82/10 (2015.01 - EP US); Y10T 279/1258 (2015.01 - EP US)
Citation (search report)
See references of WO 2011038938A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2011038938 A1 20110407; DE 102009048170 B3 20110428; EP 2483918 A1 20120808; US 2012267244 A1 20121025; US 8871066 B2 20141028
DOCDB simple family (application)
EP 2010006052 W 20101004; DE 102009048170 A 20091002; EP 10770993 A 20101004; US 201013499889 A 20101004