EP 2502469 B1 20171018 - DEVICE AND METHOD FOR GENERATING A PLASMA BY MEANS OF A TRAVELING WAVE RESONATOR
Title (en)
DEVICE AND METHOD FOR GENERATING A PLASMA BY MEANS OF A TRAVELING WAVE RESONATOR
Title (de)
VORRICHTUNG UND VERFAHREN ZUR ERZEUGUNG EINES PLASMAS MITTELS EINES WANDERWELLENRESONATORS
Title (fr)
DISPOSITIF ET PROCÉDÉ POUR GÉNÉRER UN PLASMA AU MOYEN D'UN RÉSONATEUR À ONDES PROGRESSIVES
Publication
Application
Priority
- DE 102009046881 A 20091119
- EP 2010067815 W 20101119
Abstract (en)
[origin: WO2011061283A1] The invention relates to a device for generating a plasma, comprising an alternating voltage source (10), a traveling wave resonator (18), and coupling means (16), which are designed to couple the alternating voltage generated by the alternating voltage source (10) into the traveling wave resonator (18) such that electromagnetic traveling waves are created, wherein the traveling wave resonator (18) is designed to excessively increase the electric field strength of the electromagnetic traveling waves such that a plasma is ignited in a gas. The invention further relates to a method for generating a plasma, comprising the following steps: generating an alternating voltage; generating electromagnetic traveling waves in a traveling wave resonator (18) by coupling the alternating voltage into the traveling wave resonator (18); and excessively increasing the electric field strength of the electromagnetic traveling waves in the traveling wave resonator (18) so as to ignite a plasma in a gas. The invention further relates to the use of said device and/or of said method for plasma treatment.
IPC 8 full level
CPC (source: EP US)
H05H 1/24 (2013.01 - EP US); H05H 1/46 (2013.01 - EP US); H05H 1/466 (2021.05 - EP); H05H 1/466 (2021.05 - US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 102009046881 A1 20110526; DE 102009046881 B4 20151022; EP 2502469 A1 20120926; EP 2502469 B1 20171018; US 2012285934 A1 20121115; US 9210789 B2 20151208; WO 2011061283 A1 20110526
DOCDB simple family (application)
DE 102009046881 A 20091119; EP 10788269 A 20101119; EP 2010067815 W 20101119; US 201013508607 A 20101119