EP 2593283 A1 20130522 - CARRIER FOR A SILICON BLOCK, CARRIER ARRANGEMENT HAVING SUCH A CARRIER AND PROCESS FOR PRODUCING SUCH A CARRIER ARRANGEMENT
Title (en)
CARRIER FOR A SILICON BLOCK, CARRIER ARRANGEMENT HAVING SUCH A CARRIER AND PROCESS FOR PRODUCING SUCH A CARRIER ARRANGEMENT
Title (de)
TRÄGER FÜR EINEN SILIZIUMBLOCK, TRÄGERANORDNUNG MIT EINEM SOLCHEN TRÄGER UND VERFAHREN ZUR HERSTELLUNG EINER SOLCHEN TRÄGERANORDNUNG
Title (fr)
SUPPORT POUR BLOC DE SILICIUM, ENSEMBLE SUPPORT COMPRENANT CE SUPPORT ET PROCÉDÉ DE FABRICATION DE CET ENSEMBLE SUPPORT
Publication
Application
Priority
- DE 102010031364 A 20100715
- EP 2011061606 W 20110708
Abstract (en)
[origin: WO2012007381A1] A carrier (13) for a silicon block (31) is designed to be firmly connected as part of a carrier arrangement (11), together with a lower carrier part (25), to the silicon block (31), and to be moved together therewith for machining by sawing, cleaning or the like. The underside of the carrier (13), which points towards the silicon block (31), has a plurality of channels (29), as does the lower carrier part (25) bonded thereto, the channels (29) in each case lying one above another. Water is introduced into the channels (29) in the carrier (13) from above and can run through sawing slots in the lower carrier part (25) between the wafers of the sawn-up silicon block (31) for cleaning purposes.
IPC 8 full level
CPC (source: EP KR US)
B28D 5/00 (2013.01 - KR); B28D 5/0076 (2013.01 - EP US); B28D 5/0082 (2013.01 - EP US); B28D 5/04 (2013.01 - KR); B28D 5/045 (2013.01 - EP US); B28D 7/04 (2013.01 - KR)
Citation (search report)
See references of WO 2012007381A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 102010031364 A1 20120119; CN 103140336 A 20130605; CN 103140336 B 20151125; EP 2593283 A1 20130522; JP 2013531388 A 20130801; JP 5869566 B2 20160224; KR 20130127973 A 20131125; MY 162295 A 20170531; TW 201208808 A 20120301; TW I538775 B 20160621; US 2013112185 A1 20130509; WO 2012007381 A1 20120119
DOCDB simple family (application)
DE 102010031364 A 20100715; CN 201180034643 A 20110708; EP 11730315 A 20110708; EP 2011061606 W 20110708; JP 2013519048 A 20110708; KR 20137003768 A 20110708; MY PI2013000013 A 20110708; TW 100125194 A 20110715; US 201113810132 A 20110708