EP 2641044 A1 20130925 - SYSTEM AND METHOD FOR PURIFICATION OF SILANE USING LIQUID NITROGEN IN A POLYSILICON PRODUCTION PROCESS
Title (en)
SYSTEM AND METHOD FOR PURIFICATION OF SILANE USING LIQUID NITROGEN IN A POLYSILICON PRODUCTION PROCESS
Title (de)
SYSTEM UND VERFAHREN ZUR REINIGUNG VON SILAN MIT FLÜSSIGEM STICKSTOFF IN EINEM POLYSILICIUMHERSTELLUNGSVERFAHREN
Title (fr)
SYSTÈME ET PROCÉDÉ DE PURIFICATION DE SILANE AU MOYEN D'AZOTE LIQUIDE DANS UN PROCESSUS DE PRODUCTION DE POLYSILICIUM
Publication
Application
Priority
- US 41470210 P 20101117
- US 2011059711 W 20111108
Abstract (en)
[origin: WO2012067892A1] A system and method for improved cryogenic cooling of process streams in polysilicon manufacturing is provided. The disclosed system and method provides for the cryogenic cooling of a silane and hydrogen process stream during the manufacture of polysilicon with concurrent recovery of refrigeration capacity from the vaporized nitrogen as well as the recovery of refrigeration capacity from the cold hydrogen stream. The improved cryogenic cooling system and method reduces the overall consumption of liquid nitrogen without sacrificing cooling performance of the cryogenic cooling of the silane and hydrogen process stream.
IPC 8 full level
F25J 3/08 (2006.01)
CPC (source: EP US)
C01B 33/035 (2013.01 - EP US); F25J 3/00 (2013.01 - US); H02K 21/38 (2013.01 - EP US)
Citation (search report)
See references of WO 2012067892A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2012067892 A1 20120524; CN 103429979 A 20131204; CN 103429979 B 20151021; EP 2641044 A1 20130925; US 2014007615 A1 20140109
DOCDB simple family (application)
US 2011059711 W 20111108; CN 201180065193 A 20111108; EP 11842423 A 20111108; US 201113884647 A 20111108