EP 2681568 A1 20140108 - METHOD OF FABRICATING AN INERTIAL SENSOR
Title (en)
METHOD OF FABRICATING AN INERTIAL SENSOR
Title (de)
VERFAHREN ZUR HERSTELLUNG EINES INERTIALSENSORS
Title (fr)
PROCEDE DE FABRICATION D'UN CAPTEUR INERTIEL
Publication
Application
Priority
- FR 1151746 A 20110303
- FR 2012050236 W 20120202
Abstract (en)
[origin: WO2012117177A1] Fabrication of an inertial sensor comprising at least one measurement beam (23) and an active body formed of a proof body (13) and of deformable blades (14), said active body being maintained in suspension inside a hermetic enclosure via its blades (14), the measurement beam (23) linking a part of the proof body (13) to an internal wall of said enclosure, said measurement beam (23) exhibiting a thickness less than that of the proof body (13).
IPC 8 full level
B81C 1/00 (2006.01); G01P 1/02 (2006.01); G01P 15/08 (2006.01); G01P 15/097 (2006.01); G01P 15/12 (2006.01)
CPC (source: EP KR US)
B81B 7/02 (2013.01 - KR); B81C 1/00 (2013.01 - KR); B81C 1/00357 (2013.01 - EP); B81C 1/00666 (2013.01 - US); G01P 1/02 (2013.01 - KR); G01P 1/023 (2013.01 - EP); G01P 15/08 (2013.01 - KR); G01P 15/0802 (2013.01 - EP); G01P 15/097 (2013.01 - EP KR); G01P 15/12 (2013.01 - KR); G01P 15/123 (2013.01 - EP); B81B 2201/0235 (2013.01 - EP); B81B 2207/096 (2013.01 - EP); G01P 2015/084 (2013.01 - EP US); G01P 2015/088 (2013.01 - EP US)
Citation (search report)
See references of WO 2012117177A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
FR 2972263 A1 20120907; FR 2972263 B1 20130927; CN 103518138 A 20140115; EP 2681568 A1 20140108; JP 2014512518 A 20140522; KR 20140074865 A 20140618; US 2014024161 A1 20140123; WO 2012117177 A1 20120907
DOCDB simple family (application)
FR 1151746 A 20110303; CN 201280010090 A 20120202; EP 12707855 A 20120202; FR 2012050236 W 20120202; JP 2013555919 A 20120202; KR 20137022957 A 20120202; US 201214001799 A 20120202