EP 2681758 A1 20140108 - DEVICE FOR PRODUCING NANOPARTICLES AT HIGH EFFICIENCY, USE OF SAID DEVICE AND METHOD OF DEPOSITING NANOPARTICLES
Title (en)
DEVICE FOR PRODUCING NANOPARTICLES AT HIGH EFFICIENCY, USE OF SAID DEVICE AND METHOD OF DEPOSITING NANOPARTICLES
Title (de)
VORRICHTUNG ZUR HERSTELLUNG VON NANOPARTIKELN MIT HOHER EFFIZIENZ, VERWENDUNG DIESER VORRICHTUNG UND VERFAHREN ZUR ABSCHEIDUNG VON NANOPARTIKELN
Title (fr)
DISPOSITIF DE PRODUCTION DE NANOPARTICULES À HAUT RENDEMENT, UTILISATION DUDIT DISPOSITIF ET PROCEDE DE DEPOT DE NANOPARTICULES
Publication
Application
Priority
- FR 1100614 A 20110301
- FR 2012000069 W 20120227
Abstract (en)
[origin: WO2012117171A1] The device for producing nanoparticles (NP) comprises a target (1) furnished with a face (la) which is a source of nanoparticles, and a magnetron (2) generating a first magnetic field, the target (1) being mounted on the magnetron (2) and the first magnetic field forming field lines at the level of the nanoparticle source face (1a). The device furthermore comprises means of equilibration (7, 8, 9), of the first magnetic field at the level of the target (1), which are arranged so as to close up fleeing field lines of the first magnetic field and to maintain said lines closed up at the level of said nanoparticle source face (1a), said means of equilibration (7, 8, 9) being distinct from the magnetron (2).
IPC 8 full level
H01J 37/32 (2006.01); C23C 14/34 (2006.01); C23C 14/35 (2006.01); H01J 37/34 (2006.01)
CPC (source: EP US)
B82Y 40/00 (2013.01 - EP US); C23C 14/228 (2013.01 - EP US); C23C 14/35 (2013.01 - US); H01J 37/3405 (2013.01 - EP US); H01J 37/3408 (2013.01 - EP US); H01J 37/3435 (2013.01 - EP US); H01J 37/3452 (2013.01 - EP US); H01J 37/3458 (2013.01 - EP US); H01J 37/3461 (2013.01 - EP US)
Citation (search report)
See references of WO 2012117171A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
FR 2972199 A1 20120907; FR 2972199 B1 20150424; EP 2681758 A1 20140108; US 2014001031 A1 20140102; WO 2012117171 A1 20120907
DOCDB simple family (application)
FR 1100614 A 20110301; EP 12710765 A 20120227; FR 2012000069 W 20120227; US 201214002588 A 20120227