EP 2870115 A1 20150513 - DEVICE FOR PRODUCING AN ELECTRON BEAM
Title (en)
DEVICE FOR PRODUCING AN ELECTRON BEAM
Title (de)
VORRICHTUNG ZUR ERZEUGUNG EINES ELEKTRONENSTRAHLS
Title (fr)
DISPOSITIF GÉNÉRATEUR DE FAISCEAU D'ÉLECTRONS
Publication
Application
Priority
- DE 102012013593 A 20120707
- DE 102012108888 A 20120920
- DE 102012110627 A 20121106
- EP 2013055039 W 20130312
Abstract (en)
[origin: WO2014009028A1] The invention relates to a device (20) for producing an electron beam (4), which comprises a hot cathode (1), a cathode electrode (2), an anode electrode (3) having an opening (6) through which an electron beam (4) produced by the device can pass, wherein during the operation of the device (20) a voltage for accelerating the electrons exiting from the hot cathode (1) is applied between the cathode electrode (2) and the anode electrode (3), and further comprising deflection means that can deflect the electron beam (4) that has passed through the opening of the anode electrode (3), wherein the deflection means comprise at least one deflection electrode (8, 12), which can reflect the electron beam (4) and/or which comprises a deflection surface (9) that is inclined towards the propagation direction of the electron beam (4).
IPC 8 full level
C03C 23/00 (2006.01); H01J 37/06 (2006.01); H01J 37/147 (2006.01); H01J 37/15 (2006.01); H01J 37/305 (2006.01)
CPC (source: EP US)
H01J 3/30 (2013.01 - EP US); H01J 29/04 (2013.01 - EP US); H01J 29/48 (2013.01 - EP US); H01J 29/70 (2013.01 - EP US); H01J 31/00 (2013.01 - EP US); H01J 37/06 (2013.01 - EP US); H01J 37/147 (2013.01 - EP US); H01J 37/15 (2013.01 - EP US); H01J 37/305 (2013.01 - EP US); H01J 2237/0213 (2013.01 - EP US); H01J 2237/061 (2013.01 - EP US); H01J 2237/06308 (2013.01 - EP US)
Citation (search report)
See references of WO 2014009028A1
Citation (examination)
- EP 2426693 A2 20120307 - SEMEQUIP INC [US]
- GB 2153700 A 19850829 - SONY CORP
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2014009028 A1 20140116; CN 104603078 A 20150506; CN 104603078 B 20180323; EP 2870115 A1 20150513; JP 2015522923 A 20150806; JP 6047654 B2 20161221; US 2015144800 A1 20150528; US 9773635 B2 20170926
DOCDB simple family (application)
EP 2013055039 W 20130312; CN 201380046452 A 20130312; EP 13709095 A 20130312; JP 2015518902 A 20130312; US 201314412754 A 20130312