EP 2875523 A1 20150527 - DEVICE FOR IRRADIATING A SUBSTRATE
Title (en)
DEVICE FOR IRRADIATING A SUBSTRATE
Title (de)
VORRICHTUNG ZUR BESTRAHLUNG EINES SUBSTRATS
Title (fr)
DISPOSITIF D'IRRADIATION D'UN SUBSTRAT
Publication
Application
Priority
- DE 102012106667 A 20120723
- EP 2013065082 W 20130717
Abstract (en)
[origin: WO2014016178A1] Known devices for irradiating a substrate have a housing, a receptacle with a circular irradiation surface inside the housing for the substrate to be irradiated, and a first radiator for generating optical radiation, with a first radiator tube having a radiator tube end and arranged in a plane of curvature running parallel to the irradiation surface, wherein the receptacle and the first radiator are movable relative to one another. In these devices, the irradiation surface comprises a first semicircular sub-surface and a second semicircular sub-surface. In order to specify a device for irradiating a substrate proceeding from this point that allows a rotationally symmetrical, homogeneous temperature distribution of the substrate and in addition requires low design effort and control technology expense, according to the invention the first radiator tube has a bent illumination longitudinal section, which runs with a mirror-symmetric oval basic shape in the plane of curvature, wherein the first illumination longitudinal section is associated substantially with one of the semicircular sub-surfaces.
IPC 8 full level
H01L 21/67 (2006.01)
CPC (source: CN EP KR US)
H01L 21/67115 (2013.01 - CN EP KR US); H05B 3/0047 (2013.01 - US); H05B 3/0047 (2013.01 - KR)
Citation (search report)
See references of WO 2014016178A1
Citation (examination)
- WO 0182349 A1 20011101 - TOKYO ELECTRON LTD [JP], et al
- EP 0328733 A1 19890823 - BLV LICHT & VAKUUMTECHNIK [DE]
- CN 2083341 U 19910821 - FUDAN LIGHT SOURCE ILLUMINATIN [CN]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102012106667 B3 20130725; CN 104620367 A 20150513; CN 104620367 B 20180803; EP 2875523 A1 20150527; KR 101714940 B1 20170322; KR 20150052830 A 20150514; US 2015181651 A1 20150625; US 9832817 B2 20171128; WO 2014016178 A1 20140130; WO 2014016178 A8 20150115
DOCDB simple family (application)
DE 102012106667 A 20120723; CN 201380038694 A 20130717; EP 13753110 A 20130717; EP 2013065082 W 20130717; KR 20157001464 A 20130717; US 201314416958 A 20130717