EP 2975268 A3 20160511 - VACUUM SYSTEM
Title (en)
VACUUM SYSTEM
Title (de)
VAKUUMSYSTEM
Title (fr)
SYSTÈME À VIDE
Publication
Application
Priority
DE 102014110078 A 20140717
Abstract (en)
[origin: JP2016023805A] PROBLEM TO BE SOLVED: To provide an improved vacuum system capable of accomplishing a pressure in a region of an ultra high vacuum (UHV), in particular, a pressure lower than 10hPa within a receiver for a long period of time.SOLUTION: This invention relates to a vacuum system having a vacuum pump 23 and one receiver 25 in which an outlet opening part 39 provided in an outlet 37 is aligned with an inlet opening part 41 provided in an inlet 33, a part 43 of the outlet is faced against a part 45 of the inlet, a first seal 47 is provided between the inlet part and the outlet part, a second seal part 49 is provided outside in a radial direction of the first seal, the outlet of the receiver is removably connected with the inlet of the vacuum pump and there is provided a suction part 53 for drawing vacuum at least one volume part 51 enclosed between both seals 47 and 49 and the first seal is formed as soft metallic material or elastomer.SELECTED DRAWING: Figure 1
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/08 (2006.01); F04D 29/52 (2006.01)
CPC (source: EP)
F04D 19/04 (2013.01); F04D 29/083 (2013.01); F04D 29/522 (2013.01)
Citation (search report)
- [YA] GB 2504329 A 20140129 - EDWARDS LTD [GB]
- [Y] US 3144035 A 19640811 - MARSBED HABLANIAN, et al
- [Y] EP 1852613 A2 20071107 - PFEIFFER VACUUM GMBH [DE]
- [YA] US 2003011143 A1 20030116 - SHINODA SATSUO [JP], et al
- [YA] DE 2851566 A1 19800604 - PFEIFFER VAKUUMTECHNIK
- [YA] DE 2416808 A1 19751016 - LEYBOLD HERAEUS GMBH & CO KG
- [YA] JP S5517705 A 19800207 - TOKYO KOGYO DAIGAKUCHO
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 2975268 A2 20160120; EP 2975268 A3 20160511; EP 2975268 B1 20200311; DE 102014110078 A1 20160121; JP 2016023805 A 20160208; JP 6120915 B2 20170426
DOCDB simple family (application)
EP 15174432 A 20150630; DE 102014110078 A 20140717; JP 2015142350 A 20150716