EP 3105455 A1 20161221 - PUMPING SYSTEM AND METHOD FOR LOWERING THE PRESSURE IN A LOAD-LOCK CHAMBER
Title (en)
PUMPING SYSTEM AND METHOD FOR LOWERING THE PRESSURE IN A LOAD-LOCK CHAMBER
Title (de)
PUMPSYSTEM UND VERFAHREN ZUR VERRINGERUNG DES DRUCKS IN EINER LOAD-LOCK-KAMMER
Title (fr)
SYSTÈME DE POMPAGE ET PROCÉDÉ DE DESCENTE EN PRESSION DANS UN SAS DE CHARGEMENT ET DE DÉCHARGEMENT
Publication
Application
Priority
- FR 1451075 A 20140212
- EP 2015052698 W 20150210
Abstract (en)
[origin: WO2015121222A1] The invention concerns a pumping system intended to be connected to a load-lock chamber (2) for loading and unloading a substrate (5), comprising at least a first primary pumping unit (9a, 9b) having a first maximum pumping speed (S1) and a second primary pumping unit (10a, 10b) having a second maximum pumping speed (S2), each primary pumping unit (9a, 9b, 10a, 10b) comprising a single-stage Roots vacuum pump (15) and a primary vacuum pump (13), the single-stage Roots vacuum pump (15) being mounted in series with and upstream from the primary vacuum pump (13) in the direction of flow of the gases to be pumped, said first and second primary pumping units (9a, 9b, 10a, 10b) being mounted in parallel and configured to simultaneously pump the load-lock chamber (2) for loading and unloading the substrate, characterised in that said first primary pumping unit (9a, 9b) has different pumping characteristics to said second primary pumping unit (10a, 10b), the difference between the first and second maximum pumping speeds of said first and second primary pumping units (9a, 9b, 10a, 10b) being greater than 500 m3/h. The invention also concerns a method for lowering the pressure in a load-lock chamber (2).
IPC 8 full level
F04B 37/14 (2006.01); F04B 41/06 (2006.01); F04C 25/02 (2006.01)
CPC (source: EP KR)
F04B 37/14 (2013.01 - EP KR); F04B 41/06 (2013.01 - KR); F04C 25/02 (2013.01 - KR)
Citation (search report)
See references of WO 2015121222A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
FR 3017425 A1 20150814; CN 105980706 A 20160928; CN 105980706 B 20180622; EP 3105455 A1 20161221; EP 3105455 B1 20180829; KR 102229080 B1 20210316; KR 20160122759 A 20161024; WO 2015121222 A1 20150820
DOCDB simple family (application)
FR 1451075 A 20140212; CN 201580008126 A 20150210; EP 15708739 A 20150210; EP 2015052698 W 20150210; KR 20167024457 A 20150210